真空镀膜机自动控制系统应用研究  

Research on Application of Automatic Control System of Vacuum Coating Machine

作　　者：石斌 SHI Bin(Huizhou Huasunshine Science Technology Co., Ltd.,Huizhou 516005)

机构地区：[1]惠州市华阳光学技术有限公司

出　　处：《现代制造技术与装备》2019年第6期205-206,共2页Modern Manufacturing Technology and Equipment

摘　　要：结合真空镀膜机自动控制系统应用背景,对其自动化控制系统进行全面探讨与设计,其中主要包括靶电源、抽真空、水冷设备、电流电压、温度、气体流量以及压力等自动测量系统。通过对该系统动态控制,实现设备自动化操作,提升企业成本管理效益。In this paper, combined with the application background of the automatic control system of the vacuum coating machine, the automatic control system is discussed and designed comprehensively, including the electrical control system such as target power supply, vacuum pumping, water cooling equipment,as well as the automatic measurement system of current, voltage,temperature, gas flow and pressure. Through the dynamic control of the system, the automatic operation of the equipment is realized,and the cost management efficiency of the enterprise is improved.

关 键 词：真空镀膜机 自动控制 系统设计 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]