一种新型螺旋形分布式RF MEMS移相器的设计  

Design on a New Spiral Distributed RF MEMS Phase Shifters

作　　者：张晓桐 董自强[1] 张松 胡天宇[1] 苗峻 李旭[1] 朱林[1] 唐立赫 王大宇[1] ZHANG Xiaotong;DONG Ziqiang;ZHANG Song;HU Tianyu;MIAO Jun;LI Xu;ZHU Lin;TANG Lihe;WANG Dayu(The 54th Research Institute of CETC, Shijiazhuang 050081, China)

机构地区：[1]中国电子科技集团公司第五十四研究所

出　　处：《无线电工程》2019年第8期727-732,共6页Radio Engineering

基　　金：海洋公益行业科研专项经费基金资助项目(201305028)

摘　　要：针对传统的分布式射频(RF)微机电系统(MEMS)移相器结构可靠性较低、平面面积较大、对制作工艺要求较高的问题,设计了一种新型5位分布式RF MEMS移相器,对其螺旋形共面波导结构和31个MEMS开关组进行了简要介绍及仿真分析。移相器体积为2.6 mm×2.6 mm×0.505 mm,工作频率为40 GHz时,31个仿真相移量与设计目标相移量的误差小于3.72°,满足高频、小面积、低损耗和低成本的MEMS相控阵系统应用的需求。In view of the existing problems such as low reliability,large planar area and high manufacturing difficulty in RF MEMS phase shifters,a 5 bit spiral distributed RF MEMS phase shifter is proposed.The spiral CPW structure and the group of 31 MEMS switches are introduced and simulated.The volume of the phase shifter is 2.6 mm ×2.6 mm ×0.505 mm,and the deviation of the design target is within 3.72° in 40 GHz.The simulation results show that the phase shifter can meet the application requirements of MEMS phased array system for high frequency,small size,low loss and low cost.

关 键 词：RF MEMS 移相器 MEMS开关 相控阵雷达 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术]