不锈钢基压电厚膜微悬臂梁传感器的制作与测试  

The Fabrication and Performance Test of PZT Thick Film Microcantilever Sensor Based on Stainless Steel Substrate

作　　者：周鹏 王大志[1] 石鹏 赵奎鹏 姜重阳 王柱 ZHOU Peng;WANG Da-zhi;SHI Peng;ZHAO Kui-peng;JIANG Chong-yang;WANG Zhu(Key Laboratory for Micro/Nano Technology and System,Liaoning Province,Dalian University of Technology,Dalian116024,China;SAIC Motor Corporation Limited,Shanghai 200041,China)

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116024 [2]上海汽车集团股份有限公司,上海200041

出　　处：《机电工程技术》2019年第7期32-34,共3页Mechanical & Electrical Engineering Technology

基　　金：国家自然科学基金资助项目(编号:51475081);精密测试及仪器国家重点实验室开放基金资助项目(pilab1804);中央高校基本科研业务费资助项目(DUT18LAB17)

摘　　要：制备了不锈钢基底压电厚膜微悬臂梁传感器。利用精密激光加工技术制备了厚度为100μm的不锈钢微悬臂梁基底,由于不锈钢具有良好的导电性,可以作微悬臂梁传感器的下电极,采用模板辅助电雾化沉积技术在不锈钢微悬臂梁基底上制备了厚度为20μm的致密PZT厚膜,利用磁控溅射技术制备了30/200 nm厚的Ti/Pt上电极,最终形成了压电厚膜微悬臂梁传感器。多普勒激光测振实验表明,在20 V的激励电压下,压电厚膜微悬臂梁谐振频率为19 kHz。In this paper, the PZT thick film microcantilever sensor based on stainless steel substrate was fabricated. Stainless steel microcantilever substrates with thickness of 100μm were prepared by precision laser processing and used as the lower electrode because of good electrical conductivity.The dense PZT thick film with thickness of 20μm was prepared on the stainless steel microcantilever substrate by template-assisted electrohydrodynamic atomization deposition(EHDA) technique. Then, the 30/200 nm-thick Ti/Pt was prepared as the top electrode by magnetron sputtering and the PZT thick film microcantilever sensor was finally formed. Laser Doppler vibration experiment showed that the resonant frequency of PZT thick film microcantilever is 19 kHz when the excitation voltage was 20 V.

关 键 词：微悬臂梁传感器 PZT厚膜 电雾化沉积 模板辅助 不锈钢 

分 类 号：TM282[一般工业技术—材料科学与工程]