基于HTCC电路的MEMS复合同振型水听器设计  

Design on a Composite MEMS Resonant Type Vector Hydrophone Based on HTCC Circuit

作　　者：张松 董自强[1] 胡天宇[1] 苗峻 李旭[1] 朱林[1] 唐立赫 张晓桐 王大宇[1] ZHANG Song;DONG Ziqiang;HU Tianyu;MIAO Jun;LI Xu;ZHU Lin;TANG Lihe;ZHANG Xiaotong;WANG Dayu(The 54th Research Institute of CETC, Shijiazhuang 050081, China)

机构地区：[1]中国电子科技集团公司第五十四研究所

出　　处：《无线电工程》2019年第9期829-833,共5页Radio Engineering

基　　金：海洋公益行业科研专项基金资助项目(201305028)

摘　　要：矢量水听器是感知水下声信息的重要设备,基于MEMS微加工工艺研制了一种复合同振型矢量水听器,将MEMS矢量水听器芯片与压电陶瓷环在结构上组合在一起,能够同时拾取水下目标信号的标量信息和矢量信息。内部集成了HTCC调理电路,能够有效降低传感器耦合噪声,提高检测信号的信噪比。通过驻波管计量,MEMS复合式水听器的工作频率范围为20~1000Hz,矢量振速通道灵敏度为-170.5dB@1kHz,标量声压通道灵敏度为-174.7dB@1kHz。通过内嵌电路,信噪比提高了15dB。The vector hydrophone is an important equipment to perceive underwater acoustic information. Based on MEMS microfabrication technology, a composite resonant type vector hydrophone is developed. By combining structurally the MEMS vector hydrophone chip with piezoelectric ceramic ring,this hydrophone can pick up both scalar and vector information of underwater target signals at the same time. HTCC conditioning circuit is integrated inside the hydrophone,which can effectively reduce sensor coupling noise and improve the signal to noise ratio. The results of measurement with standing-wave tube are that the working frequency range is 20~1 000Hz,the sensitivity of vector channels is -170.5 dB@ 1 kHz and that of the scalar channel is -174.7 dB@ 1 kHz. By using the embedded circuit,the signal-to-noise ratio is improved by 15 dB.

关 键 词：MEMS 同振型 矢量水听器 高温共烧陶瓷内嵌电路 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术]