制冷机低温泵控制器设计  

Design of a refrigerator cryopump controller

作　　者：冯欣宇[1,2] 邓家良 曾环 韩雨松 Feng Xinyu;Deng Jialiang;Zeng Huan;Han Yusong(Vacree Technologies Co. , Ltd. , Hefei 230088, China;The 16th Research Institute of China Electronics Technology Group Corporation,Hefei 230088,China)

机构地区：[1]安徽万瑞冷电科技有限公司,合肥230088 [2]中国电子科技集团有限公司第十六研究所,合肥230088

出　　处：《低温与超导》2019年第7期24-28,共5页Cryogenics and Superconductivity

基　　金：国产集成电路装备零部件量产应用工程——低温真空泵开发及产业化项目(2014ZX02001-003)资助

摘　　要：制冷机低温泵产品配置专用控制器,其目的是实现自动完全再生、获取运行状态信息、提供远程监控接口与操作,提高低温泵产品的自动化水平。在充分研究主流制冷机低温泵产品的基础上,针对12英寸以下口径低温泵,设计了专用控制器,介绍了器件选型、人机界面、软、硬件结构等内容。经过24个月不间断运行测试,验证了低温泵控制器设计的正确性与可靠性。The purpose of dedicated controller for refrigerator cryopump is to achieve automatic full regeneration, obtain op erating status information, provide remote monitoring interface and operation, improve the automation level of cryopump products. On the basis of fully researching mainstream refrigerator cryopump products, a special controller was designed for the cryopump with inlet diameter less than 12 inches. The component selection, human - machine interface, software and hardware structure were introduced. During 24 months of continuous operation testing, the correctness and reliability of the controller design were verified..

关 键 词：制冷机 低温泵 控制器 加热功率 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置]