环境微振动下超精密加工设备基础隔振分析  

Analysis of Vibration-isolated Foundation of Ultra-precision Equipment under Micro Environment Vibration

作　　者：夏泓泉 范进[1] 何嫣然 丁建国[1] XIA Hongquan;FAN Jin;HE Yanran;DING Jianguo(College of Civil Engineering, Nanjing University of Science and Technology, Nanjing 210094, China)

机构地区：[1]南京理工大学土木工程系

出　　处：《机械制造与自动化》2019年第4期37-38,45,共3页Machine Building & Automation

摘　　要：为研究超精密加工设备隔振基础的隔振效果,以某超精密加工设备为研究对象,设计了隔振系统,分析了系统在环境微振动下的振动响应,发现在x方向能得到很好的隔振效果。另外,通过调整隔振基础厚度和隔振弹簧刚度,分析了加工设备对外界环境微振动的响应变化情况。To research on the vibration-isolated effect of the vibration-isolated foundation for the particular ultra-precision equipment, this paper takes an ultra-precision equipment as object of study, designs its vibration-isolated system and analyzes its vibration-isolated effect under micro vibration environment, the vibration-isolated effect in X directions is acceptable. Furthermore, its vibration-isolated effect can be improved by adjusting the status of the foundation and the stiffness of isolation spring.

关 键 词：超精密加工 环境振动 隔振基础 频域响应 隔振参数 

分 类 号：TH161[机械工程—机械制造及自动化]