Research on Measurement Accuracy of the Double-Channel Microwave Power Sensors Based on an MEMS Cantilever Beam  

作　　者：WANG Debo WU Lele LI Longfei DAI Ruiping 

机构地区：[1]Nanjing University of Posts and Telecommunication

出　　处：《Chinese Journal of Electronics》2019年第5期916-919,共4页电子学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.61704086);the Province Natural Science Foundation of Jiangsu(No.BK20140890);the Open Research Fund of Key Laboratory of MEMS of Ministry of Education,Southeast University(No.3206005302);the Scientific Research Foundation of Nanjing University of Posts and Telecommunications(No.NY215139,No.NY217039)

摘　　要：A thermopile-based microwave power sensor and a double-channel microwave power sensor are compared in order to research the measurement accuracy of microwave power. The relationship of the displacement of MEMS cantilever beam with the measured microwave power is researched, and the reason that the microwave power consumed by the MEMS cantilever cannot be ignored at low power level is explained. The ratio of microwave power consumed by the MEMS cantilever with the microwave frequency is obtained, and the measured results show that the percentage is 51.96%@8GHz, 52.31%@10GHz and 55.11%@12GHz on the average, respectively. There is an important reference value to achieve the accurate microwave power measurement of the double-channel microwave power sensors.A thermopile-based microwave power sensor and a double-channel microwave power sensor are compared in order to research the measurement accuracy of microwave power. The relationship of the displacement of MEMS cantilever beam with the measured microwave power is researched, and the reason that the microwave power consumed by the MEMS cantilever cannot be ignored at low power level is explained.The ratio of microwave power consumed by the MEMS cantilever with the microwave frequency is obtained,and the measured results show that the percentage is 51.96%@8 GHz, 52.31%@10 GHz and 55.11%@12 GHz on the average, respectively. There is an important reference value to achieve the accurate microwave power measurement of the double-channel microwave power sensors.

关 键 词：Thermopile-based power sensor MEMS CANTILEVER Double-channel Measurement ACCURACY 

分 类 号：TN[电子电信]