高量程加速度计横向各向异性响应的自由落杆冲击评估法（英文）  

Evaluation of the Transverse Anisotropy Response of High-g Accelerometers by a Free-Drop-Bar Impact Method

作　　者：鲍海飞[1] 宋朝辉 李昕欣[1] Bao Haifei;Song Zhaohui;Li Xinxin(State Key Lab of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室

出　　处：《微纳电子技术》2019年第9期734-744,753,共12页Micronanoelectronic Technology

摘　　要：采用自由落杆冲击法对悬臂梁型高量程加速度计(50000g)的横向响应进行研究。钢杆和铝合金杆作为冲击体与地面上放置的金属钢砧碰撞产生应力波作为激励源,用于表征加速度计的性能,其中加速度计固定在金属杆的顶端。该方法不仅可以测量加速度计敏感轴的灵敏度,同时也可以测试其横向响应。实验表明,加速度计的各向异性响应与加速度计的固有结构和冲击体的直径紧密相关,理论计算与实验结果相一致。A free-drop-bar impact method was used to investigate the transverse response of a cantilever-beam high-gaccelerometer(50 000g).The steel bar and aluminum alloy bar were used as impactors to collide with the metal steel anvil placed on the ground to produce the stress wave. The performance of the accelerometer was characterized with the stress wave as an excitation source,meanwhile the accelerometer was attached at the top of the metal bar.This method not only can measure the sensitivity of the sensitive axis for the accelerometer,but also can test the transverse response.The experiment shows that the anisotropy response is closely related to the intrinsic structure of the accelerometer and the bar diameter.A good consistency between the experiment and calculation results was obtained.

关 键 词：横向响应 高量程加速度计 冲击 物理效应 灵敏度 

分 类 号：TH824.4[机械工程—仪器科学与技术] TH703[机械工程—精密仪器及机械]