用于水下金属探测成像的压电式微机械超声波换能器  

A piezoelectric micromechanical ultrasonic transducer for underwater metal detection imaging

作　　者：杨晋玲 YANG Jinling(Science and Technology on Electronic Test &Measurement Laboratory,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学电子测试技术国家重点实验室

出　　处：《中国测试》2019年第9期84-88,共5页China Measurement & Test

基　　金：国家自然科学基金项目(61525108)

摘　　要：为满足目前对水下金属、蛙人等检测的应用需要,设计一种用于水下金属探测成像的压电式微机械超声换能器。在该结构中,在顶部电极和下电级之间插入AlN层,用于发射和接收超声。当测试距离达到10 m以上就可以满足实际应用需求,而该换能器经过实验得出最远的测试距离为12.8 m,且在12.8 m处测试值与理论值误差仅为0.67 cm,完全可以达到实际检测需要。在一个标准大气压下,利用微系统激光分析仪MSA400对该传感器进行膜位移测量,其测量值为0.28μm,与理论结果误差为1%。并且详细介绍该传感器的工艺实现过程。利用该传感器实现二维水下超声成像,证明水下存在金属矩形物体。该实验有利于水下超声成像系统的建立。In order to meet the current application needs of underwater metal and frogman detection.A piezoelectric micromachined ultrasonic transducer(PMUT)for underwater imaging is designed.In the structure,Insert AlN layer between top electrode and lower stage.The transducer is mainly used in a long distance test of underwater environment,the farthest distance is 12.8 m,and the error between the test value and the theoretical value at 12.8 m is only 0.67 cm.The micro system laser analyzer MSA400 has measured the displacement of the sensor at a standard atmospheric pressure of 0.28μm,and the theoretical error is 1%.The manufacturing operation of the sensor is introduced in detail.Two-dimensional underwater ultrasonic imaging is realized using the sensor,which proved the existence of rectangular objects under water.The experimental results showed that our work can facilitate the establishment of underwater ultrasonic imaging system.

关 键 词：PMUT C-V测试 超声成像 远距离 

分 类 号：O426.9[理学—声学]