Mirau型干涉显微物镜干涉平板装配误差容限分析  

Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective

作　　者：胡捷 袁群[1] 于颢彪 王帅[1] 孙一峰 高志山[1] Hu Jie;Yuan Qun;Yu Haobiao;Wang Shuai;Sun Yifeng;Gao Zhishan(School of Electronic and Optical Engineering , Nanjing University of Science and Technology ,Nanjing , Jiangsu 210094, China)

机构地区：[1]南京理工大学电子工程与光电技术学院

出　　处：《中国激光》2019年第9期146-152,共7页Chinese Journal of Lasers

基　　金：国家重大仪器专项(2013YQ150829);中央高校基本科研业务专项(30917011107,30918014115-004)

摘　　要：针对Mirau型干涉显微物镜中干涉平板的装配误差问题,建立了参考板倾斜时的干涉光强表征模型,通过对光瞳面内测试光束和参考光束的分割,求解参考板倾斜时干涉光强的积分表达形式,通过数值计算定量分析参考板倾斜度对干涉条纹包络、对比度的影响,并采用宽带光八步移相算法进行三维形貌复原,据此确定参考板倾斜误差的容限。设计了50×Mirau型干涉显微物镜的参考板倾斜验证结构,通过实验测量了标准台阶板,验证了仿真分析模型的准确性,确定了50×干涉显微物镜中参考板倾斜误差容限为1.5°。To analyze the assembly error of the interferometer plate in the Mirau interference-microscope objective, we create a characterization model of interference light intensity of a tilted reference plate. By dividing the test beam and reference beam in the pupil plane, the integral expression of the interference light intensity is obtained when the reference plate is tilted. The influence of the tilted reference plate on the envelope and contrast of interference fringes is quantitatively analyzed by numerical simulation. Then, the tilt error tolerance of the interferometer plate is determined by the results of three-dimensional morphology reconstruction using an eight-step phase-shifting algorithm for broadband light. An experimental verification structure consisting of a Mirau interference-microscope 50× objective is fabricated and a standard step is experimentally measured to verify the accuracy of the simulation model. Results show that the tilt angle of the interferometer plate in a Mirau interference-microscope 50× objective should be constrained to be less than 1.5°.

关 键 词：显微 干涉显微物镜 色散 倾斜 装配误差 误差容限 

分 类 号：O436[机械工程—光学工程]