基于透射式激光空气隙干涉的纳米分辨率精密位移测量  

Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference

作　　者：王子轩 冀聪 王晶 杨钢 王肖隆 林强[1] Wang Zixuan;Ji Cong;Wang Jing;Yang Gang;Wang;Xiaolong Lin Qiang(Center for Optics and Optoelectronics Re sea rch , College of Science , Zhejiang University of Technology ,Hangzhou , Zhejiang 310023, China)

机构地区：[1]浙江工业大学理学院光学与光电子研究中心

出　　处：《中国激光》2019年第9期181-185,共5页Chinese Journal of Lasers

基　　金：国家自然科学基金(61875175,61727821);国家重点研发计划项目(2017YFC0601602,2016YFF0200206);中国科学院重点实验室开放项目(A109018237)

摘　　要：基于透射式激光空气隙干涉原理,建立微位移测量系统,实现纳米分辨率的物体微小位移测量。利用外加微小位移并将前后光强度相减的图像处理方法,有效地提高激光干涉图像的信噪比,将掩没于杂散噪声中的干涉条纹提取出来。实验结果表明,该系统的相对位移测量分辨率优于10 nm,绝对位移测量不确定度优于5%。该系统结构紧凑,安装、使用方便,测量分辨率达到nm级,可实现快速、便捷、稳定的测量,适用于临时性的高分辨率精密位移测量需求。A micro-displacement measurement system is established based on transmissive laser air-wedge interference. The system realizes displacement measurement in one dimension with nanometer resolution. We use an image processing method, applying an extra small displacement and calculating the light intensity difference, to extract the interference patterns buried in stray light and noise, and effectively improve the signal-to-noise ratio of the laser interferometric images. Results show that the relative displacement resolution of the system is better than 10 nm and the absolute displacement measurement uncertainty is better than 5%. The measuring system is compact in structure, easy to install and use, and the measuring resolution reaches the nanometer level. It realizes fast, convenient and stable measurement, and is suitable for temporary demand of high resolution and precision displacement measurements.

关 键 词：测量 微位移测量 激光干涉 图像处理 高分辨率 空气隙干涉仪 

分 类 号：O436.1[机械工程—光学工程]