集成式偏振红外焦平面探测器的制备  

Polarizer fabricated onto infrared focal detector

作　　者：林国画[1] 张敏 孟令伟[1] 宁提[1] 刘明[1] LIN Guo-hua;ZHANG min;MEN Ling-wei;NING Ti;LIU Ming(North China Research Institute of Electro-Optics,Beijing 100015,China)

机构地区：[1]华北光电技术研究所

出　　处：《激光与红外》2019年第10期1234-1238,共5页Laser & Infrared

摘　　要：集成式偏振红外焦平面探测器是红外探测器应用的新的发展方向,国内近几年开展了相关的研究工作,本文围绕集成式长波320×256碲镉汞偏振红外焦平面探测器的研制,叙述了从技术路线选择到偏振结构的设计、制备等方面开展的工作及阶段测试结果,这些工作为后续的研制打下了良好的基础。Integrated polarization infrared focal plane detector is a new development direction of infrared detector application,and relevant research work has been carried out in China in recent years.Focusing on the development of integrated polarization LW 320×256 HgCdTe infrared focal plane detector,this paper introduces the work from the selection of technical route to the design and preparation of polarization structure,and presents the phase test results,which lays a good foundation for the subsequent development.

关 键 词：集成偏振探测器 光刻 偏振对比度 

分 类 号：TN216[电子电信—物理电子学]