有源相控阵天线瓦片式T/R组件基板气密性研究  

Research on Gas Tightness for Active Phased Array Antenna Stacked T/R Modules

作　　者：王康[1] 王杰 杨宗亮 刘慧荣 赵飞[1] WANG Kang;WANG Jie;YANG Zongliang;LIU Huirong;ZHAO Fei(The 54th Research Institute of CETC,Shijiazhuang,050081,China;Hebei Branch of China Communication System Co.,Ltd.,Shijiazhuang 050081,China;Heibei Far-East Communication System Engineering Co.,Ltd.,Shijiazhuang 050035,China)

机构地区：[1]中国电子科技集团公司第五十四研究所,河北石家庄050081 [2]中华通信系统有限责任公司河北分公司,河北石家庄050081 [3]河北诺亚人力资源开发有限公司,河北石家庄,050035

出　　处：《电子工艺技术》2019年第5期275-278,共4页Electronics Process Technology

基　　金：科工局装备发展预研项目(41423010609)

摘　　要：瓦片式有源相控阵天线具有体积小、质量轻和频率高等优点,是目前研究的热点。LTCC基板在有源相控阵天线瓦片式T/R组件中,不仅提供电路功能,还提供结构支撑作用。对DuPont和Ferro两种LTCC基板封装体进行气密性测试,分析试验结果发现:DuPont基板本身的气密性可以达到10^-9Pa·m^3/s;Ferro基板由于材料本身的多孔结构,在压力作用下,基板表层一定厚度内多孔结构中吸附大量气体,气密性介于10^-8~10^-6Pa·m^3/s之间,这种基板本身的气密性表现,将会直接影响以Ferro基板作为封装外壳的T/R组件气密性测试结果。The stacked active phased array antenna is a research hotspot because of the advantages of small size,light weight and high frequency performance.LTCC substrate provides not only circuit functions, but also structure support in T/R modules of the stacked active phased array antenna.Gas tightness of DuPont and Ferro LTCC substrate packages was tested.The results show that the leak rate of package with DuPont substrate is less than 10^-9 Pa·m^3/s;But the leak rate of package with Ferro substrate is intermediate between 10^-8 Pa·m^3/s to 10^-6 Pa·m^3/s.The reason is that the porous structure in a certain thickness of the Ferro substrate surface absorbs a large amount of helium under a certain pressure.The results have a directly effect on the gas tightness of T/R modules with Ferro substrate as package.

关 键 词：气密性 LTCC基板 瓦片式结构 有源相控阵天线 

分 类 号：TN605[电子电信—电路与系统]