Li掺杂量对Li-N共掺ZnO薄膜光学性能的影响  

Effect of Li doping on optical properties of Li-N Co-doped ZnO films

作　　者：王玉新[1] 王磊[1] 王媛媛 李真 赵帅 张巍[1] WANG Yu-xin;WANG Lei;WANG Yuan-yuan;LI Zhen;ZHAO Shuai;ZHANG Wei(School of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,China)

机构地区：[1]辽宁师范大学物理与电子技术学院

出　　处：《光电子．激光》2019年第9期930-934,共5页Journal of Optoelectronics·Laser

基　　金：辽宁省教育厅科学研究基础项目“Ⅲ-Ⅴ族元素掺杂ZnO薄膜的制备及其光电性能研究(LJ2019006)资助项目

摘　　要：本文利用溶胶-凝胶旋涂法在玻璃衬底上制备了本征、N单掺和Li-N共掺的ZnO薄膜。研究Li掺杂量的改变对薄膜的晶体结构、表面形貌、透过性能和发光性能的影响。采用了紫外-可见分光光度计(UV-VIS)、光致发光谱(PL)、扫描电子显微镜(SEM)和X射线衍射仪(XRD)等表征手段对样品进行了测试。结果表明:Li掺杂量的改变对薄膜的结构和性能都有一定的影响,随着Li掺杂量的增加,(002)衍射峰强度增大,晶粒尺寸先增加后减小,紫外发射峰的强度和薄膜的透过性能同样是先增强后减弱。当Li元素的原子比为6 at%时,薄膜的c轴择优取向明显,结晶性能最好,薄膜紫外发光最强,透过率最大。In this paper,the intrinsic,N-doped and Li-N co-doped ZnO thin films were prepared on glass substrates by sol-gel spin-coating method.The effects of the doping amount of Li on the crystal structure,surface morphology,transmittance of the films and luminescence were investigated.UV-Vis spectrophotometer(UV-VIS),photoluminescence(PL),scanning electron microscope(SEM) and X-ray diffractometer(XRD) were used to characterize the samples.The results show that the structure and properties of the films are influenced by the doping amount of Li.With the increase of the doping amount of Li,the(002) diffraction peak intensity increases,and the grain size increases first and then decreases.The intensity of the UV emission peak and the transmittance of the film are enhanced first and then weakened.When the doping amount of Li is 6 at%,the preferred orientation of the c axis of the thin film is the most obvious,the ultraviolet luminescence is the strongest and the transmittance is the largest.

关 键 词：ZNO薄膜 溶胶-凝胶法 Li-N共掺 晶体结构 表面形貌 发光性能 

分 类 号：O484.4[理学—固体物理]