LTCC基板表层金膜红斑问题分析研究  

Analysis and Research on Golden Film Layer with Red Spot in the Surface of LTCC Substrate

作　　者：杨靖鑫[1,2] 麻茂生 吴申立[1,2] 丁小聪[1,2] YANG Jing-xin;MQ Mao-sheng;WU Shen-li;DING Xiao-cong(No.43 Research Institute of CETC,Hefei 230088 ,China;Anhui Province Technical Standard Innovation Base,Hefei 230001;Instruments' Center for Physical Science,University of Science and Technology of China,HeFei 230026,China)

机构地区：[1]中国电子科技集团公司第四十三研究所,合肥230088 [2]安徽省技术标准创新基地,合肥230001 [3]中国科学技术大学理化科学实验中心,合肥230026

出　　处：《混合微电子技术》2019年第1期46-53,共8页Hybrid Microelectronics Technology

摘　　要：本文针对LTCC基板表层金膜红斑问题进行了分析研究,采用的分析手段分别有扫描电镜分析(SEM)和X射线光电子能谱分析。通过扫描电镜对LTCC金膜层表面红色斑点区域的微观形貌和成分进行了分析,发现红斑区域含有少量Ag元素;采用X射线光电子谱分析仪(XPS)对LTCC金膜层表面红色斑点中元素原子外层电子的结合能状态进行了观测和分析,发现红斑区域除了含有少量银(Ag)元素外,还含有微量的硫(S)元素。通过进一步研究,分析出Ag元素和S元素的化学结合状态,确定了LTCC基板金膜层表面红斑的物质构成为Ag2S和AgO的混合物,解释了红斑形成的机理,提出了相应的预防和改进措施。最后,对表面有红斑现象和退斑处理后的基板进行了一系列可靠性试验评价与论证,试验结果表明两者膜层性能均合格,证明了退斑措施的有效性和可行性。This paper mainly studies the problem of golden film with red spot in the surface of LTCC substrate. Scanning electron microscopy ( SEM) and X-Ray photoelectron spectroscopy ( XPS) were used as the analytical methods. The microstructure and composition of the red spotted area on LTCC golden film layer are analyzed by scanning electron microscopy. It is found that the red spotted area contains a small amount of Ag element. Meanwhile, the state of binding energy of the outer electrons of the atomic atoms in the red spots on the surface of the LTCC substrate is observed and analyzed. Besides, it is found that the red spotted area contains a trace amount of sulfur in addition to a small amount of silver. Through further research, the chemical bonding state of silver and sulfur was analyzed, and the composition of the red spotted area on the surface of the gold film of the LTCC substrate was determined to be a mixture of silver sulfide and silver oxide, which explain the formation mechanism of the red spot and propose corresponding prevention and improvement measures. Finally, a series of reliability tests and demonstrations were carried out on the substrate with red spot and fading treatment. The results show that both layers are qualified, which proves the effectiveness and feasibility of the speckle removal measures.

关 键 词：LTCC基板 金膜层 红斑现象 XPS分析 机理 退斑处理 

分 类 号：TN401[电子电信—微电子学与固体电子学]