考虑温度影响的砷化镓光子晶体压力传感器的设计与研究  

Design and Research of GaAs Photonic Crystal Pressure Sensor Considering Temperature Influence

作　　者：夏雨 陈德媛[1] 陈兵 张岩[1] 李梦凡 XIA Yu;CHEN Deyuan;CHEN Bing;ZHANG Yan;LI Mengfan(College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210046,China)

机构地区：[1]南京邮电大学电子与光学工程学院微电子学院

出　　处：《传感技术学报》2019年第10期1457-1461,共5页Chinese Journal of Sensors and Actuators

摘　　要：提出了一种由双通道滤波器构成的砷化镓光子晶体压力传感器,利用波导与腔耦合实现窄带滤波,双通道分别实现压力探测和温度探测的功能。以室温25℃、0压力的情况作为参考,在温度为-25~45℃、压力为0~2GPa的范围内,根据滤波器的滤波波长分别与温度和压力之间的线性变化关系,探测温度和压力。同时还分析并比较了极端温度情况下滤波波长的变化,确定温度变化对压力测量造成的影响,在较恶劣的情况下温度变化不可忽略。分析得出未考虑温度响应的压力灵敏度约为16.6nm/GPa,消除温度响应后压力灵敏度约为15.9nm/GPa,品质因子高达5696。We propose a GaAs photonic crystal pressure sensor composed of a dual-channel filter.The narrow-band filter was realized by coupling the waveguide and the cavity,so that the dual-channel realizes the functions of pressure detection and temperature detection,respectively.Taking 25 ℃(room temperature)and 0 GPa(pressure)as reference,in the range of -25 ℃~45 ℃ and 0~2 GPa,the temperature and pressure were detected according to the linear relationship between the filter wavelength of the filter and the temperature and pressure.The variation of the filter wavelength under extreme temperature conditions was analyzed and compared.The influence of the temperature change on the pressure measurement was determined,so that the temperature change could not be neglected.The pressure sensitivity without considering the temperature response is around 16.6 nm/GPa,and the pressure sensitivity after eliminating the temperature response is around 15.9 nm/GPa,and the quality factor is as high as 5 696.

关 键 词：光子晶体 温度干扰 双通道滤波器 压力探测 温度探测 灵敏度 极端温度 

分 类 号：O472[理学—半导体物理]