矩形光栅局部结构误差对衍射效率的影响  

Influence of partial structure error of rectangular grating on diffraction efficiency

作　　者：邓启威 张蓉竹[1] 孙年春[1] DENG Qiwei;ZHANG Rongzhu;SUN Nianchun(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学电子信息学院

出　　处：《激光技术》2019年第5期635-640,共6页Laser Technology

基　　金：国家八六三高技术研究发展计划资助项目(2015AA8042038)

摘　　要：为了提高高光谱遥感技术的分析精度,利用标量衍射理论,对矩形光栅局部结构误差的衍射效率进行了分析,并计算了光栅局部周期和缝宽误差对衍射效率的影响。结果表明,当加工误差使得光栅局部缝宽变大时,会造成光栅各主极大(除零级)衍射光强变小,这一误差对±1级处的衍射光强影响相对较小,随着误差的增加,越高的衍射级次其光强下降得越快;而当加工误差使得光栅局部缝宽变小时,会造成光栅各主极大(除零级)衍射光强变大,同样,当误差变大时,相对±1级的衍射光受到的影响而言,级次越高对应的主极大衍射光强增大得越快。该研究对于加工矩形光栅减小局部周期和缝宽误差控制提供了参考。In order to improve the analysis accuracy of hyperspectral remote sensing technology,the diffraction efficiency of partial structural errors of rectangular gratings was analyzed by using scalar diffraction theory.The influence of grating local period and slit width error on diffraction efficiency was calculated.The results show that,when the processing error makes the local slit width of grating wider,the main maxima intensity(excluding zero order)of the grating decreases.This error has a relatively small effect on the intensity of the diffracted light at±1 order.With the increase of the error,the higher the diffraction order,the faster the intensity of the light decreases.With the increase of the error,relative to the effect on±1 order diffraction light,the higher the order,the faster the principal maximum diffraction intensity increases.This study provides a reference for the control of local period and slit width error in processing rectangular gratings.

关 键 词：光栅 衍射效率 标量衍射理论 局部结构误差 

分 类 号：TN253[电子电信—物理电子学]