“半导体器件实验”课程改革探索与实践  

Exploration and Practice on the Reform of the Experimental course of Semiconductor Devices

作　　者：雷冰洁 张国和[1] 程军[1] 雷绍充[1] LEI Bing-jie;ZHANG Guo-he;CHENG Jun;LEI Shao-chong(School of Microelectronics,Xi’an Jiaotong University,Xi’an 710049,China)

机构地区：[1]西安交通大学电子与信息工程学院

出　　处：《电气电子教学学报》2019年第4期134-136,共3页Journal of Electrical and Electronic Education

基　　金：西安交通大学教学改革研究项目(项目编号:17ZX072)

摘　　要：“半导体器件实验”是微电子科学与工程专业的重要必修课程。以往的实验教学中存在与理论教学脱节,与工业界标准相差甚远以及实验仪器昂贵等问题。通过建立基于实际代工工艺的半导体集成电路器件模拟测试教学实验平台,模拟最新工业标准的半导体器件的特性,使学生深入理解半导体器件的理论知识,培养创新型人才。Semiconductor Device Experiment is an important compulsory course for microelectronics science and engineering.In the past,there are some problems in experimental teaching,such as disjointing with theoretical teaching,far from the standard of industry,and expensive experimental instruments.Through the establishment of a semiconductor integrated circuit device simulation test teaching experiment platform based on actual foundry technology,the characteristics of the latest industrial standard semiconductor devices are simulated,so that students can deeply understand theoretical knowledge of semiconductor devices and cultivate innovative talents.

关 键 词：半导体器件实验 模拟测试 电子设计自动化 

分 类 号：G434[文化科学—教育学]