线结构光传感器的静态性能测试研究  

Static performance test of line structured light sensors

作　　者：李昱坤 石照耀[1] 于渤[1] 王涛[1] 李学哲 LI Yu-kun;SHI Zhao-yao;YU Bo;WANG Tao;LI Xue-zhe(Beijing Engineering Research Center of Precision Measurement Technology and Instruments,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学北京市精密测控技术与仪器工程技术研究中心

出　　处：《机电工程》2019年第9期925-930,共6页Journal of Mechanical & Electrical Engineering

基　　金：国家自然科学基金资助项目(51635001)

摘　　要：针对线结构光传感器各项静态性能参数对其测量精度影响的问题,设计了一套线结构光传感器静态性能测试方案。在高精度移动平台上使用二级量块、纳米定位台和激光干涉仪,对传感器的重要静态性能参数,如稳定性、重复性和线性度进行了分析,量化了各项静态性能参数对传感器测量精度的影响;以二级量块的工作面作为传感器测试试验的测量表面,结合高精度移动平台实现了传感器全测量区域的测试;使用激光干涉仪对移动平台的定位误差进行了补偿,提高了测量结果的可信度。研究结果表明:传感器需1 h的时间进行稳定来保证测量精度,其测量区域的中部重复性最佳,该区域重复性均值为0.418μm;传感器线性度对其测量精度影响最大,由传感器非线性引起的误差最大为11.2μm。Aiming at the influence of various static performance parameters of line structured light sensors on its measurement accuracy a plan of line structured light sensors static performance test scheme was designed.A second level gauge block nano positioning table and la ser interferometer were used on high precision mobile platform.The important static performance parameters such as stability repeatability and linearity were analyzed to quantify the influence of various static performance parameters on the measurement accuracy of the sensor.The working surface of the second level gauge block was used as the measurement surface during the test.The high precision mobile platform was used to test the whole measurement area of the sensor.The laser interferometer was used to compensate the positioning error of the mobile platform which improved the reliability of the measurement result.The research results indicate that the sensor needs 1 hour to ensure the measurement accuracy and the repeatability of the middle measurement area is the best with an average value of 0.418μm.The linearity of the sensor has the greatest influence on the measurement accuracy.The error caused by the sensor nonlinearity is at most 11.2μm.

关 键 词：线结构光传感器 静态性能 稳定性 重复性 线性度 

分 类 号：TH741.12[机械工程—光学工程] TP212[机械工程—仪器科学与技术]