一种用于线膨胀系数测量的高稳定性激光干涉系统  

A High Stability Laser Interferometer for Measurement of Coefficient of Linear Thermal Expansion

作　　者：任冬梅[1] 兰一兵[1] 段小艳[1] 万宇[1] REN Dongmei;LAN Yibing;DUAN Xiaoyan;WAN Yu(Changcheng Institute of Metrology&Measurement,Beijing 100095,China)

机构地区：[1]航空工业北京长城计量测试技术研究所

出　　处：《计测技术》2019年第5期37-39,共3页Metrology & Measurement Technology

基　　金：国家“十三五”技术基础科研项目(JSJL2016205C003)

摘　　要：介绍了一种可以对材料长度变化进行测量的高稳定性双光程激光干涉系统,由于该干涉系统的测量光路和参考光路具有相似的传播路径,光程差仅由被测试样的长度引起,干涉系统具有较强的抵抗环境温度变化和振动等外界干扰的能力。通过平晶反射膜测量试验,对干涉系统的稳定性进行了验证,结果表明在6.5 h内测量数据的标准偏差为4.2 nm。该激光干涉系统可用于材料尺寸变化(如线膨胀系数)的高准确度测量。A high stability double-pass laser interferometer that can be used for measuring the length changes of materials is introduced.Since the measurement beam and the reference beam of the interferometer have similar traveling paths and the optical path difference is mainly caused by the sample itself,the interferometer has strong resistance to external disturbances such as ambient temperature changes and vibration.The stability of the system is verified by the experiment of measuring the reflection film of a plane mirror,which shows that the standard deviation of the measurement data is 4.2 nm in 6.5 h.This interferometer can be used for high-accuracy dimensional change measurement such as the measurement of the coefficient of linear thermal expansion of materials.

关 键 词：激光干涉仪 测量 线膨胀系数 高稳定性 

分 类 号：TB921[一般工业技术—计量学]