卢瑟福背散射分析元素浓度深度分布的计算方法研究  

Study on Calculation Method of Lutherford Backscattering Element Concentration and Depth Distribution Analysis

作　　者：陈秀莲 张洁 覃雪 刘军 CHEN Xiulian;ZHANG Jie;QIN Xue;LIU Jun(School of Physical Science and Technology,Sichuan University,Chengdu 610064,China)

机构地区：[1]四川大学物理科学与技术学院

出　　处：《实验科学与技术》2019年第5期102-107,124,共7页Experiment Science and Technology

摘　　要：卢瑟福背散射实验可通过背散射粒子的能谱分析材料中杂质元素浓度及深度分布,其中,获取深度分布的计算方法主要包括近似计算法(表面能量近似和平均能量近似)与数值积分法,计算过程涉及的阻止本领由SRIM程序给出。该文对计算难度小、准确度低的近似计算方法和计算难度大、准确度高的数值积分法进行了比较,给出在5%误差范围内表面能量近似和平均能量近似的适用范围,为实验数据处理过程中计算方法的选取提供依据。The Rutherford backscattering experiment can analyze the concentration and depth distribution of impurity elements in materials by the energy spectrum of backscattered particles. The calculation methods for obtaining depth distribution mainly include approximate calculation method(surface energy approximation and average energy approximation)and numerical integration method.The stopping power involved in the calculation process is given by the SRIM program. In this paper,the approximate calculation method with low computational difficulty and low accuracy is compared with the numerical integration method with high computational difficulty and high accuracy. The applicable range of surface energy approximation and average energy approximation in the range of 5% error is given,and the range provides a basis for the selection of the calculation method in the experimental data processing.

关 键 词：卢瑟福背散射实验 表面能量近似 平均能量近似 数值积分 

分 类 号：TL814[核科学技术—核技术及应用]