CVD样品台旋转对沉积金刚石涂层的影响  

Effect of Sample Rotation on Chemical Vapor Deposition Diamond Coatings

作　　者：邓福铭 薄祥[1] 许晨阳 郝岑[1] 王双 郭振海 解亚娟 DENG Fu-ming;BO Xiang;XU Chen-yang;HAO Cen;WANG Shuang;GUO Zhen-hai;XIE Ya-juan(School of Mechanical Electronic&Information Engineering,China University of Mining and Technology(Beijing),Beijing 100083,China;Superhard Tool Materials Research Institute,China University of Mining and Technology(Beijing),Beijing 100083,China)

机构地区：[1]中国矿业大学(北京)机电与信息工程学院,北京100083 [2]中国矿业大学(北京)超硬刀具材料研究所,北京100083

出　　处：《人工晶体学报》2019年第10期1879-1885,共7页Journal of Synthetic Crystals

基　　金：北京市自然科学联合基金(15L00025);国家自然科学基金(51172278);北京市财政共建项目(2017-03)

摘　　要：以CH 3 COCH 3和H 2为反应气源,利用热丝化学气相沉积(HFCVD)方法,通过改变样品台的旋转频率在YG6硬质合金(WC-6wt%Co)基体上沉积金刚石涂层。利用X射线衍射分析YG6硬质合金表面沉积金刚石涂层物相,通过扫描电子显微镜和压痕试验机分析金刚石涂层的表面形貌、沉积厚度和膜基结合性能,考察了样品台旋转频率对沉积金刚石涂层结构与性能的影响,以确定最佳的样品台旋转频率。结果表明,在固定沉积工艺参数条件下,当样品台的旋转频率为2次/h时,在YG6硬质合金基体上沉积的金刚石涂层具有较优的晶粒和更均匀致密的聚晶结构以及更高的膜-基结合力。Hot filament chemical vapor deposition(HFCVD)diamond coatings were deposited on YG6 cemented carbide(WC-6wt%Co)matrix using CH 3 COCH 3 and H 2 as reaction gas sources by means of changing the rotation frequency of the sample table.The surface morphology,thickness and bonding properties of diamond coatings were analyzed by scanning electron microscope,X-ray diffraction and indentation test,and the effect of the rotation frequency of the sample table on the structure and properties of the deposited diamond coating was investigated in order to determine the optimal rotation frequency of the sample table.The results show that under the condition of fixed deposition process parameters,when the rotation frequency of the sample table is 2 times per hour,the diamond coating deposited on the YG6 cemented carbide substrate has better grain size and more uniform dense polycrystalline diamond structure and higher interfacial bonding force of diamond coating to the substrate.

关 键 词：热丝化学气相沉积 金刚石涂层 硬质合金基体 样品台 旋转频率 

分 类 号：TB43[一般工业技术]