微光学元件宽带光源照明下无色散边界条件探讨  

Non-dispersion boundary conditions of micro-optical element illuminated by broadband light source

作　　者：黄燕燕[1] 张旭琳[1] 杨伟[1] 王笑冰[1] 雷蕾 彭文达[1] 徐平[1] Huang Yan-Yan;Zhang Xu-Lin;Yang Wei;Wang Xiao-Bing;Lei Lei;Peng Wen-Da;Xu Ping(College of Physics and Optoelectronic Engineering,Institute of Micro-Nano Photoelectronic Technology,Shenzhen University,Shenzhen 518060,China)

机构地区：[1]深圳大学物理与光电工程学院深圳大学微纳光电子技术研究所

出　　处：《物理学报》2019年第22期302-309,共8页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:61275167);深圳市基础研究计划(批准号:JCYJ20180305125430954,JCYJ20140418095735591,JCYJ20130329103020637)资助的课题~~

摘　　要：基于宽带光源微光学元件(如集成导光板)在衍射色散方面的设计需求,本文构建了宽带光源微光学元件衍射理论分析模型,探讨分析了衍射光谱的色度规律特性,提出并定义了能准确定量衡量衍射光束色散程度的色散量C,同时明确给出了零色散的边界判据点.通过对研制的矩形位相光栅进行测试分析,所得的光谱色度特性规律与理论分析结果相一致,实验结果验证了本文提出的色散度判据参量C和零色散边界点的正确性.本文提出的宽带光源色散度判据参量C、零色散边界判据点,不仅为集成导光板结构参数的设计提供指导,而且也能为其他宽带微光学元件的设计过程中探讨色散特性时提供指导.With the development of the microstructure fabrication process and the integration of micro-optical elements,diffractive micro-optical elements are widely used in broadband light sources,such as the integrated light guide plate(ILGP).And with the structural feature size of the ILGP decreasing from tens of microns to microns and even sub-microns,the diffraction dispersion phenomenon will inevitably become a prominent problem in research and design of non-dispersion elements.Nevertheless,under the broadband light source illumination,the analysis of the dispersion characteristic of diffraction spectrum of the microstructure array has not been reported in detail.Therefore a theoretical model of micro-optical element with a typical onedimensional rectangular phase grating(RPG)and a widely used white LED source is established in this paper.The dispersion characteristic of the diffraction spectrum is studied,that is,with the increase of period of the RGP or the cone angle of incident beam,the dispersion of diffraction spectrum weakens.Dispersion parameter C and its formula are proposed,which can precisely measure the chromatic dispersion degree of the diffraction spectrum.Furthermore,the boundary criterion point of non-dispersion C=0.3 is given explicitly.It is explored that no matter whether the cone angle of incident beam or the RPG period increases,the non-dispersion output light can be obtained only by matching the two parameters to make the dispersion parameter C less than 0.3.Then an RPG sample,of which the structural parameters are consistent with the designed ones,is fabricated by using micro-nano processing technology.By changing the cone angle of incident beam,the luminance and the chromaticity coordinates of the diffraction beam are tested.The analyses of the test results of the fabricated RPG sample show that the spectrum dispersion regularity is in accord with the theoretical analysis.The consistency verifies the correctness of dispersion parameter C,its formula and the non-dispersion boundary criterion poi

关 键 词：微光学元件 宽带光源 无色散 集成导光板 

分 类 号：TN9[电子电信—信息与通信工程]