不同模式纳秒激光诱导单晶硅损伤特性研究  

Study on damage characteristics of monocrystalline silicon induced by nanosecond laser with different modes

作　　者：肖超 王毕艺[2] 官上洪[2] 张发旺 杨静[1] 陈怡妍 王钰倩 邱荣 郭德成[1,3] 蒋勇 XIAO Chao;WANG Biyi;GUAN Shanghong;ZHANG Fawang;YANG Jing;CHEN Yiyan;WANG Yuqian;QIU Rong;GUO Decheng;JIANG Yong(Joint Laboratory for Matter Properties in Extreme Conditions,Southwest University of Science and Technology,Research Center of Laser Fusion,CAEP,Mianyang 621010,China;Security Control Laboratory,Science and Technology on Electro-optical Information,Tianjing 300308,China;Sichuan Civil-military Integration Institute,Mianyang 621010,China)

机构地区：[1]西南科技大学,中国工程物理研究院激光聚变研究中心极端条件物质特性联合实验室,四川绵阳621010 [2]光电信息控制和安全技术重点实验室,天津300308 [3]四川省军民融合研究院,四川绵阳621010

出　　处：《激光杂志》2019年第11期67-70,共4页Laser Journal

基　　金：国家自然科学科学基金资助项目(No.61505170,61775235,61705205,U1530109,61505171);西南科技大学龙山人才计划资助项目(No.17LZX669、18LZX516);大学生创新创业计划项目(No.S201910619073、S201910619039)

摘　　要：采用1 064 nm激光器在单纵模和多纵模模式下对单晶硅材料的损伤特性进行研究,测试和分析单晶硅损伤阈值和损伤形貌差异,损伤机理以及激光模式对周期性结构的影响。结果表明,激光模式对单晶硅材料的损伤阈值和损伤面积的影响小。因单晶硅材料对激光的强吸收,直接导致单晶硅表面的熔融烧蚀破坏、热应力和等离子体的产生。随着激光能量的增大,由于热应力和等离子体冲击波的存在,使损伤面积以指数形式增大,熔融物质形成喷溅而后消失。The difference of damage threshold and morphology of monocrystalline silicon were investigated by 1064 nm laser with single and multi-longitudinal modes.Meanwhile,the damage mechanisms and the influence of modes on periodic structure are also studied.The results indicate that laser mode has little effects on damage threshold and damage area of monocrystalline silicon.Moreover,the silicon surface is damaged by melt ablation,thermal stress and plasma because of strong absorption of laser.With the increasing of laser energy,the damage area increases exponen-tially due to thermal stress and plasma shock wave,and the melted material will be ejected firstly and disappeared at last.

关 键 词：纳秒激光 激光模式 单晶硅 周期性条纹 损伤演化 

分 类 号：TN249[电子电信—物理电子学]