基于MEMS技术的石蜡驱动气体微流量调节阀研究  

MEMS based Paraffin-Actuated Gas Flow Regulating Microvalve

作　　者：王丰羽 杭观荣 王平阳[1] 李林 WANG Feng-yu;HANG Guan-rong;WANG Ping-yang;LI Lin(School of Mechanical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China;Shanghai Engineering Research Center of Space Engine,Shanghai Institute of Space Propulsion,Shanghai 201112,China)

机构地区：[1]上海交通大学机械与动力工程学院,上海200240 [2]上海空间发动机工程技术研究中心,上海空间推进研究所,上海201112

出　　处：《节能技术》2019年第5期471-475,共5页Energy Conservation Technology

基　　金：上海市科学技术委员会资助课题(17DZ2280800)

摘　　要：针对微纳卫星冷气推进系统和空间电推进系统变推力的任务需求,提出一种基于MEMS(微机电系统)技术的相变材料气体微流量调节阀设计方案以实现对推进工质的流量调节。利用MEMS加工工艺制得微致动器和微流量调节阀,通过表面轮廓仪测量微致动器调节膜片形变特性与输入电流的相互关系,通过间接法测量流经该调节阀的气体质量流量,结果表明:当输入电流小于12 mA,微致动器无明显形变,微阀气体流量无明显变化;当输入电流大于12 mA,微致动器形变明显增加,微阀气体流量显著减小;当输入电流大于48 mA,微致动器形变基本不变,微阀气体流量降至最低,接近关闭状态。因此气体微流量调节阀的有效工作电流区间为12~48 mA。In order to meet the demand for variable thrust generated by cold gas propulsion system of micro nano satellites and multi-mode electric propulsion system,a design scheme was proposed for regulating the propellant,which was a MEMS based active valve actuated by paraffin.On the basis of MEMS processing technology,the paraffin actuated micro actuator and flow regulating valve was obtained.After that,the relationship between deflection height of diaphragm in micro actuator and input electric current was investigated through surface profilometer.In addition,the mass flowrate through the channel in microvalve was measured via an indirect manner.The experimental results showed that when input current was less than 12 mA,there was no obvious deformation for micro actuator and no significant change for gas flowrate through microvalve;when input current was more than 12 mA and less than 48 mA,the micro actor deformed obviously and the gas flowrate changed significantly;when the input current was more than 48 mA,nearly no deformation was observed and the gas flowrate decreased to minimum,which indicated that the microvalve was switched off.In conclusion,the effective working range of input current for the microvalve was 12~48 mA.

关 键 词：流量调节 微阀 微致动器 石蜡 微机电系统 

分 类 号：V439[航空宇航科学与技术—航空宇航推进理论与工程]