ZrN系硬质膜的研究进程与展望  

Research Progress and Prospect of Multi Component ZrN-Based Hard Films

作　　者：杨晨 张钧[1] 孙宇菲 彭立静 YANG Chen;ZHANG Jun;SUN Yu-fei;PENG Li-jing(College of Mechanical Engineering,Shenyang University,Shenyang 110044,China)

机构地区：[1]沈阳大学机械工程学院

出　　处：《材料保护》2019年第10期134-139,共6页Materials Protection

基　　金：辽宁省自然科学基金项目(2015020216)资助

摘　　要：以ZrN硬质薄膜为基础,通过添加金属元素,可以形成多组元硬质薄膜体系。从制备方法、晶体结构、硬度、耐磨性、抗氧化性、耐腐蚀性、电气性能等方面对ZrN系硬质薄膜的发展现状进行了讨论和分析,给出了比较和评述。在此基础上,提出了ZrN系硬质薄膜今后的研究和应用发展方向。The multi-component hard film system based on ZrN can be formed by adding metal elements. The development current situation of the ZrN-based hard film system was discussed and analyzed in terms of preparation methods,crystal structure,hardness,wear resistance,oxidation resistance,corrosion resistance and electrical properties. Moreover,the comparisons and comments were presented as well. Based on this,the future development direction of research and application was proposed.

关 键 词：ZrN系硬质薄膜 硬度 耐磨性 抗氧化性 耐腐蚀性 

分 类 号：TG174.44[金属学及工艺—金属表面处理]