轰击离子能量对V2AlC MAX相涂层结构及力学性能的影响  

Effects of Bombarding Ions Energy on Structure and Mechanical Properties of V2AlC MAX-phase Coatings

作　　者：赵公澍 葛芳芳 程晓英[1] 黄峰 ZHAO Gongshu;GE Fangfang;CHENG Xiaoying;HUANG Feng(School of Materials Science and Engineering,Shanghai University,Shanghai 200444;Engineering Laboratory of Advanced Energy Materials,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China)

机构地区：[1]上海大学材料科学与工程学院,上海200444 [2]中国科学院宁波材料技术与工程研究所先进能源材料工程实验室,宁波315201

出　　处：《中国表面工程》2019年第3期80-87,共8页China Surface Engineering

基　　金：国防科技工业核动力技术创新中心(HDLCXZX-2018-ZH-038)~~

摘　　要：采用物理气相沉积(PVD)磁控溅射沉积方法,通过改变轰击离子能量制备高密度的V2AlC涂层,并探究不同轰击离子能量对涂层结构和性能的影响。利用能谱仪测试、X射线衍射、拉曼光谱、扫描电镜、原子力显微镜对涂层的化学组成、相结构、表面与截面形貌进行分析,同时利用纳米压痕测试评价V2AlC涂层力学性能。结果表明,提高轰击离子能量从15 eV到35 eV可以有效使得V2AlC涂层致密化,且降低涂层表面粗糙度~50%(从~20.2 nm到~11.9 nm),同时提高涂层的硬度~50%(从~14 GPa到~21 GPa),与杨氏模量~20%(从~309 GPa到~363 GPa)。但当轰击离子能量升高到50 eV时,Al元素含量急剧下降,涂层由V2AlC相转变为V2C与VC多相混合。轰击离子能量的提高有效改善V2AlC涂层的结构,提高V2AlC涂层的硬度,杨氏模量,但需控制轰击离子能量改变范围才可实现结构与性能最优化。MAX phases are among popular surface protective coatings for the zirconium alloy cladding materials,because of their remarkable chemical,physical,electrical,and mechanical properties.Preparing the MAX-phase coatings at low temperature,without any cost of properties,especially the mechanical properties,is of technological importance in practical applications.The low-energy ion bombardment assistance was introduced to prepare the high density V2AlC coatings by magnetron sputtering.The chemical composition,phase structure,surface morphology,cross-sectional structure of the coatings deposited at different bombardment ion energy were characterized by energy dispersive spectrometer,X-ray diffractometry,Raman spectroscopy,scanning electron microscope and atomic force microscope.The mechanical property was tested by nanoindentation.The results show that the increase in the bombardment ion energy from 15 eV to 35 eV can effectively densify the V2AlC coating and reduce the surface roughness of the coating by about 50%(from 20.2 nm to 11.9 nm),while increasing the hardness of the coating by about 50%(from 14 GPa to 21 GPa),and Young's modulus about 20%(from 309 GPa to 363 GPa).However,when the bombardment ion energy increases to 50 eV,the Al element content decreases dramatically,and the phase structure of the coating is transformed from V2AlC to V2C and VC mixed.The increase in the bombardment ion energy can effectively densify the structure of the V2AlC coating,improve the hardness value and Young's modulus of the V2AlC coating.However,it is necessary to control the range of bombardment ion energy to optimize the structure and performance.

关 键 词：离子辅助 MAX相涂层 磁控溅射 微观结构 力学性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]