微球透镜超分辨显微成像与检测技术综述  

Review of microsphere optical microscopy for super-resolution imaging and metrology

作　　者：徐伟[1] 袁群[1] 高志山[1] 于颢彪 孙一峰 屈艺[2] XU Wei;YUAN Qun;GAO Zhishan;YU Haobiao;SUN Yifeng;QU Yi(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;College of Automation,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]南京理工大学自动化学院,江苏南京210094

出　　处：《应用光学》2019年第6期1139-1151,共13页Journal of Applied Optics

基　　金：中央高校基本科研业务专项资金(30917011107,30918014115-004);国家自然科学基金(U1931120)

摘　　要：受衍射极限的影响,传统光学显微镜的分辨率最高约为波长的一半,突破衍射极限,获得更高的成像分辨率是近年来显微成像领域的研究热点。相比于其他超分辨显微成像方式,基于微球透镜的超分辨显微成像方式具有简单直接、免标记等优点。主要介绍国内外研究团队将微球与传统的光学显微镜结合实现超分辨显微成像的研究进展,从微球透镜参数选择、成像方案、成像分辨率、成像视场及成像机理等多角度进行总结与比对;并结合课题组工作,介绍了将微球透镜与干涉显微技术相结合的三维超分辨检测技术,阐述了Linnik型与Mirau型两种检测光路原理,分析了三维超分辨检测的效果;展望了微球透镜超分辨显微技术在显微成像与显微干涉检测两个方面待解决的问题与发展方向。Due to the diffraction limit, the greatest resolution of conventional optical microscopes is about half of the wavelength. Efforts to overcome the diffraction limit and to obtain higher imaging resolution have been hot researching spots of optical microscopy imaging field in recent years.Compared with other types of super-resolution microscopy imaging, the method based on microsphere optical microscopy is characterized by simple direct and label-free, etc. This paper briefly introduces the research progress of super-resolution microscopy imaging is, which combines microsphere with conventional optical microscopes by domestic and foreign teams, summarizes and compares from multiple aspects of microsphere lens parameters, imaging scheme, resolution, field and mechanism. Further, this paper elaborates the three-dimensional super-resolution metrology by combining microsphere lens with interference microscopy, is d as well as our research team work, described the optical paths in the types of Linnik and Mirau are, and analyzes the super-resolution measuring results are. Finally, it discusses the applications of the microsphere lens for super-resolution in microscopy imaging and interference metrology, and some of the future research works are prospected.

关 键 词：微球透镜 衍射极限 光子纳米喷射 倏逝波 干涉显微 超分辨成像 

分 类 号：O439[机械工程—光学工程]