级联型高压重频微秒脉冲电源的研制  

Design of Cascade High-voltage Repeated-frequency Microsecond-pulse Power Supply

作　　者：韩静[1,2] 高迎慧[1,2] 孙鹞鸿[1,2] 严萍[1,2] 邵涛[1,2] HAN Jing;GAO Yinghui;SUN Yaohong;YAN Ping;SHAO Tao(Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China;Key Laboratory of Power Electronics and Electric Drive,Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院电力电子与电气驱动重点实验室,北京100190

出　　处：《高电压技术》2019年第11期3762-3768,共7页High Voltage Engineering

基　　金：国家电网有限公司科技项目(5419-201940218A-0-0-00)~~

摘　　要：高压脉冲电源是产生低温等离子体的重要手段,在放电等离子体领域有着广泛应用。针对该领域对脉冲电源高功率密度、小型化要求的不断提高,设计研发了一种轻量化、紧凑型的级联高压微秒脉冲电源。电源的输出指标为:脉冲电压0~20 kV,重复频率0~10 kHz可调,脉宽5~30μs可调。该设计采用级联型电压叠加方式,将电源分为40个电压等级为500 V的重复单元模块,通过光纤触发系统控制每级模块半导体开关绝缘栅双极型晶体管(insulated gate bipolar transistor,IGBT)的开通和关断,得到不同脉宽和不同重复频率的高压脉冲波形。该设计优势在于将高压电源作低压模块化处理,每级主电路与开关驱动电路集成于1块PCB电路板上,大大简化系统结构,缩小系统体积。最后将研制的脉冲电源样机在阻性负载和放电电极负载下进行实验,实验结果表明光纤触发系统的同步性良好,电源的输出满足设计指标。High-voltage pulse power supply is an important means of producing low-temperature plasma,which is widely used in the field of discharge plasma.Aiming at the continuous improvement of electromagnetic launch technology on the power density of high-voltage power supply,a miniaturization and cascade high-voltage pulse power supply is designed.The technical specifications of the power supply are:pulse voltage 0~20 kV,pulse width 5~30μs and repetition frequency 0~10 kHz(adjustable).The cascaded voltage superposition mode is used to divide the power supply into 40 repetitive cell modules with each 500 V.The semiconductor switch insulated gate bipolar transistor(IGBT)is controlled by the optical fiber trigger system to obtain the high-voltage pulse waveform with different pulse widths and repetition frequencies.The design advantage lies in the modularization of high voltage power supply for low voltage.The main circuit and switch driver circuit of each stage are integrated on a PCB board,which greatly simplifies the system structure and reduces the system volume.The pulsed power supply is tested under resistive and electrode load,which show that the consistency of the optical fiber trigger system is good,and the output index meets the design requirements.

关 键 词：级联电源 高压脉冲电源 同步触发 高重复频率 半导体开关 

分 类 号：TN86[电子电信—信息与通信工程] O53[理学—等离子体物理]