透射光栅位移传感器中光栅副Yaw向夹角误差的影响和监测  

Influence and monitoring of yaw angle error of grating pair in transmission grating displacement sensor

作　　者：王笑一[1] 户璐卿 雷贤卿[1] 左孝林 王永军 郭阳阳 WANG Xiao-yi;HU Lu-qing;LEI Xian-qing;ZUO Xiao-lin;WANG Yong-jun;GUO Yang-yang(School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China)

机构地区：[1]河南科技大学机电工程学院

出　　处：《光学精密工程》2019年第10期2154-2164,共11页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目（No.51775172）

摘　　要：透射光栅副的Yaw向夹角误差是影响光栅信号质量的重要因素,但现有的数学模型不能精确反映Yaw向夹角误差对光栅信号质量的影响规律。建立了同时考虑光电池性能参数、光电池安装位置、指示光栅与标尺光栅夹角误差等因素的光栅信号利萨如图形的数学模型,研究了光栅副Yaw向夹角误差对利萨如图形形状的影响机理,发现利萨如图形的离心率和倾斜程度与光栅副Yaw向夹角误差之间存在规律性的数学关系,通过实测实验验证了该关系。数值仿真与实验测量得到的利萨如图形的离心率和倾角的相对误差分别小于1%和3%,验证了数学模型的正确性和有效性。建立的数学模型和数值关系为光栅生产中的信号质量调整和运动部件(读数头)Yaw向运动误差实时监测和误差修正提供了理论基础。The yaw angle error of a transmission grating pair is an important factor affecting the quality of the grating signal, but the existing mathematical model cannot accurately reflect the influence of the yaw angle error on the quality of grating signal. A mathematical model of the Lissajous figure of the grating signal was established in this paper, considering factors such as the performance parameters of a photocell, installation position of the photocell, and the angle error between the indicator and scale gratings. The influence mechanism of the angle error in the yaw axis of the grating pair on the shape of a Lissajous figure was studied. We found regular mathematical relationships among the eccentricity, tilt of the Lissajous figure, and angle error in the yaw axis of grating pairs. The relationship is verified experimentally. The relative error of the eccentricity and tilt of the Lissajous figure obtained by numerical simulation and experimental measurement are less than 1% and 3%, respectively, which verifies the correctness and effectiveness of the proposed mathematical model. The established mathematical model and the numerical relationships found provide a theoretical basis for signal quality adjustment in grating production and real-time monitoring of yaw axis motion errors of moving parts (reading heads) in use.

关 键 词：透射光栅 夹角误差 利萨如图形 误差修正 离心率 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]