新型同轴电极结构碳纳米管场发射电离计  

A New Carbon Nanotube Field Emission Ionization Gauge With Coaxial Electrodes

作　　者：何剑锋 黄卫军 董长昆[1] HE Jian-feng;HUANG Wei-jun;DONG Chang-kun(Institute of Micro-Nano Structures&Optoelectronics,Wenzhou University,Wenzhou 325035,China)

机构地区：[1]温州大学微纳结构与光电器件研究所

出　　处：《真空》2019年第6期12-15,共4页Vacuum

基　　金：国家科学基金资助，项目号：61620106006

摘　　要：本文以碳纳米管(CNT)作为阴极电子源设计一种新型的冷阴极电离真空计结构,结构包括场发射电子源、阳极和离子收集极,阳极和离子收集极为同轴圆环结构。利用热化学气相沉积法在金属基底上直接生长碳纳米管,分别制备了4mm×5mm矩形和直径0.1mm圆形两种阴极发射面。碳纳米管阴极具有优异的场发射性能,开启电场1.70 V/μm。在氮气环境下,分别对不同阴极真空电离计结构的真空测量性能进行了研究,真空计在10-7到10-3Pa区间归一化电流(Ii/Ia)与压强表现出良好的线性关系,矩形和圆形发射面阴极对应的真空计其测量灵敏度分别是3.1×10-2Pa^-1和1.3×10-2Pa^-1。In this p aper,a new type of cold cathode ionization vacuum gauge with carbon nanotube(CNT)field emission cathode is designed.The device consists of a field emission cathode,an anode grid,and an ion collector,with the anode and ion collector coaxial arranged.The carbon nanotubes were grown directly on the metal substrate by chemical vapor deposition,and two types of cathodes with 4 mm×5 mm rectangle andΦ0.1 mm circular emission surfaces were investigated respectively.The carbon nanotube cathodes presented excellent field emission performance with turn-on electric field of 1.70 V/μm.In the nitrogen environment,the vacuum measurement performance of the gauges based on two kinds of cathodes is investigated respectively,the normalized current(Ii/Ia)range and the pressure show a good linear relationship from 10^-7 to 10^-3 Pa,and the measurement sensitivities of the gauges corresponding to the cathodes of rectangular and circular emission areas are 3.1×10-2 Pa^-1 and 1.3×10^-2 Pa^-1,respectively.

关 键 词：碳纳米管 场发射 电离真空计 同轴电极 灵敏度 

分 类 号：TN304[电子电信—物理电子学]