LCSLM相位调制特性及其在非球面测量中的应用  

Phase Modulation Characteristics of LCSLM and Its Applications in Aspheric Surface Measurements

作　　者：马文超 申文[1,2] 胡栋挺 刘新宇 赵子云 曹朔 苏宙平 朱华新[1,2] 张逸新 陈国庆[1,2] 胡立发 Ma Wenchao;Shen Wen;Hu Dongting;Liu Xinyu;Zhao Ziyun;Cao Shuo;Su Zhouping;Zhu Huaxin;Zhang Yixin;Chen Guoqing;Hu Lifa(School of Science,Jiangnan University,Wuxi,Jiangsu 214122,China;Jiangsu Provincial Research Center of Light Indzcstry Opto-Electronic Engineering and Technology,Wuxi,Jiangsu 214122,China)

机构地区：[1]江南大学理学院,江苏无锡214122 [2]江苏省轻工光电工程技术研究中心,江苏无锡214122

出　　处：《激光与光电子学进展》2019年第22期165-172,共8页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61475352)

摘　　要：液晶空间光调制器(LCSLM)在非显示领域有着广泛的应用。利用夏克哈特曼波前探测器对LCSLM的相位调制特性进行测量,结果表明,低阶Zernike模式的线性相位调制范围相对较大,随着调制范围的增加,衍射效率下降明显。对LCSLM用于非球面面形测量的可能性进行初步探讨,为扩展非球面面形检测方法提供一种全新的思路。A liquid crystal spatial light modulator(LCSLM)has a wide range of applications in the non-display field.In this study,the phase modulation characteristics of LCSLM are evaluated using a Shack-Hartmann wavefront detector.The results denote that the linear phase modulation range of the low-order Zernike mode is relatively large,and the diffraction efficiency significantly decreases as the modulation range increases.Furthermore,the possibility of using LCSLM for performing aspherical surface measurements is discussed,which provides a new approach for expanding the method of aspheric surface shape detection.

关 键 词：光学器件 液晶空间光调制器 夏克哈特曼波前探测器 Zernike模式 面形测量 非球面 

分 类 号：O436[机械工程—光学工程]