衬底温度对钛镁掺杂氧化锌薄膜光学性能的影响  

Influence of substrate temperature on optical properties of titanium and magnesium doped ZnO thin films

作　　者：钟志有 朱雅 龙浩 王皓宁 ZHONG Zhiyou;ZHU Ya;LONG Hao;WANG Haoning(Hubei Key Laboratory of Intelligent Wireless Communications,College of Electronic Information Engineering,South-Central University for Nationalities,Wuhan 430074,China)

机构地区：[1]中南民族大学电子信息工程学院智能无线通信湖北省重点实验室

出　　处：《中南民族大学学报（自然科学版）》2019年第4期566-571,共6页Journal of South-Central University for Nationalities：Natural Science Edition

基　　金：湖北省自然科学基金资助项目(2011CDB418)

摘　　要：以石英玻璃作为衬底,采用射频磁控溅射技术沉积钛镁掺杂氧化锌(TMZO)薄膜样品.基于分光光度计测量的透射光谱数据,利用光学表征方法确定了薄膜样品的折射率、消光系数和光学能隙等光学参数,研究了衬底温度对TMZO样品光学性能的影响.结果表明,可见光区域所有薄膜的折射率均随波长增加而单调减小,表现为正常的色散关系,衬底温度对薄膜样品的透光性和光学参数具有明显的影响.衬底温度升高时,TMZO样品的可见光区平均透过率和光学能隙均呈现出先增后减的变化趋势,当衬底温度为300℃时,它们都具有最大值.The titanium and magnesium doped ZnO(TMZO)thin films were deposited on quartz glass substrates by radio-frequency magnetron sputtering technique.Based on the transmittance data measured by spectrophotometer,the optical parameters such as refractive index,extinction coefficient and direct energy gap of the deposited films were determined by optical characterization methods,and the influence of substrate temperature on optical properties of the samples was investigated.The results show that the refractive index of all the samples decreases monotonically with the increase of wavelength,indicating that the deposited films possess the normal dispersion characteristics in the visible region.The substrate temperature significantly affects the transmittance and optical parameters of the thin films.With the increase of substrate temperature,both the average visible transmittance(Tav)and the direct energy band(Eg)increase initially and then decrease.When the substrate temperature is 300℃,the TMZO thin film exhibits the highest T av and the largest Eg.

关 键 词：掺杂氧化锌 薄膜 磁控溅射 光学性质 

分 类 号：TM914[电气工程—电力电子与电力传动]