多层介质膜脉宽压缩光栅清洗方法研究  

Cleaning Methods for Multilayer Dielectric Pulse Compression Gratings

作　　者：邹溪 晋云霞[1,2] 孔钒宇[1,2] 王勇禄 张益彬 邵建达[1,2] ZOU Xi;JIN Yun-Xia;KONG Fan-Yu;WANG Yong-Lu;ZHANG Yi-Bin;SHAO Jian-Da(Laboratory of Thin Film Optics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Key Laboratory of Materials for High Power Laser,Chinese Academy of Sciences,Shanghai 201800,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;School of Physical Science and Technology,Shanghai Tech University,Shanghai 201210,China)

机构地区：[1]中国科学院上海光学精密机械研究所,薄膜光学实验室,上海201800 [2]中国科学院强激光材料重点实验室,上海201800 [3]中国科学院大学材料与光电研究中心,北京100049 [4]上海科技大学物质科学与技术学院,上海201210

出　　处：《无机材料学报》2019年第12期1285-1289,共5页Journal of Inorganic Materials

基　　金：国家自然科学基金重点项目(11604352,61875212);上海市科学技术委员会(16JC1420600)~~

摘　　要：采用SPM(Sulfuric-Peroxide Mixtures,98wt%H2SO4+30wt%H2O2)+兆声(方法1)和氧等离子体+HPM(Hydrochloric/Peroxide Mixture,37wt%HCl+30wt%H2O2+DIH2O)+兆声(方法2)两种清洗方法对多层介质膜脉宽压缩光栅进行清洗,并对清洗前后样品的表面元素含量、衍射效率、表面粗糙度、表面温升以及激光损伤阈值等参数进行测量以评估两种清洗方法清洗效果。在入射角70°,脉宽12 ns,s偏振,波长1064 nm的激光辐照下,经过清洗方法1清洗后的光栅样品单脉冲激光损伤阈值为7.55 J/cm2,而方法2清洗后的样品损伤阈值为5.32 J/cm2。另外,虽然经过方法2清洗后样品表面杂质含量更低,但是在衍射效率、表面粗糙度和表面温升都劣于经方法1清洗后的样品,进一步分析发现方法2中氧等离子体清洗过程引入的Fe元素影响了其样品损伤性能和温升性能。因此,SPM清洗方法可以作为多层介质膜脉宽压缩光栅提升抗激光损伤性能的优化清洗方案。Two cleaning methods for multilayer dielectric pulse compression gratings(MDG)were studied.The first method is SPM(Sulfuric-Peroxide Mixtures,98wt%H2SO4+30wt%H2O2)+megasonic,and the second method is Oxygen plasma+HPM(Hydrochloric/Peroxide Mixture,37wt%HCl+30wt%H2O2+DIH2O)+megasonic.To com-pare the cleaning effectiveness,the element content of sample surface,diffraction efficiency,surface roughness,tem-perature rising and laser damage induced threshold(LIDT)were measured.The 1-on-1 LIDT of samples cleaned by the first and the second methods are 7.55 and 5.32 J/cm 2 respectively,with 1064 nm laser pulse(12 ns,s-polarized)at incidence angle of 70°.In addition,the sample cleaned by the second method has lower surface contamination content,but the sample cleaned by the first method has better performance in diffraction efficiency,surface roughness and temperature rising.By further analyzing,we find that element Fe brought by oxygen plasma cleaning process in the second method is the factor that affects the damage performance and temperature rising.Therefore,the cleaning method based on the first one,the SPM+megasonic is better for improving the laser damage performance of MDG.

关 键 词：多层介质膜 脉宽压缩光栅 氧等离子体 SPM HPM 

分 类 号：TH745[机械工程—光学工程]