用于流速测量的微型力传感器的研制  

Fabrication of Micro Force Sensor for Flow Velocity Measurement

作　　者：涂云婷 金敏慧 张成功 李以贵 Tu Yunting;Jin Minhui;Zhang Chenggong;Li Yigui(School of Science,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院

出　　处：《微纳电子技术》2019年第12期992-998,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51035005);上海市农委重点项目子项目(沪农科创字(2018)第3-3号));2019届毕业设计(论文)重点项目经费(1011LW190038-A22)

摘　　要：设计并仿真了一种压阻式六自由度力传感器及其测量电桥,采用微电子机械系统(MEMS)加工技术制备了以单晶硅为结构材料的六自由度力传感器,完成了传感器芯片的封帽式封装。压阻式六自由度力传感器的尺寸为5 mm×5 mm×3 mm,由传感器芯片、探测柱和封装外壳组成。基于流体的绕流阻力效应,完成了压阻式六自由度力传感器水流流速检测实验。实验证明,该传感器的量程为0~0.55 m/s,可以灵敏检测到低速水流的波动性变化,并且传感器在水流速度为0.45~0.55 m/s的测量范围内灵敏度较高。利用单晶硅材料易于小型化、滞后极小的特点,该六自由度力传感器响应快、环境适应性强、可批量制造。A piezoresistive 6-degree of freedom(6-DOF)force sensor and its measuring bridge were designed and simulated.A6-DOF force sensor with monocrystalline silicon as its structural material was fabricated by micro-electromechanical system(MEMS)processing technology,and the sealing cap package of the sensor chip was completed.The piezoresistive 6-DOF force sensor is 5 mm×5 mm×3 mm in size and consists of a sensor chip,aprobe column and a packaging shell.Based on the flow around resistance effect of the fluid,the flow velocity detection experiments of the piezoresistive 6-DOF force sensor were carried out.The experimental results show that the sensor has a range of 0~0.55 m/s,and can sensitively detect the fluctuation change of low-speed water flow.Moreover,the sensor has a high sensitivity in the flow velocity measurement range of 0.45~0.55 m/s.Using the characteristics of monocrystalline silicon material,such as easy miniaturization and minimal lag,the 6-DOF force sensor has fast response,strong environmental adaptability,and can be achieved batch manufacturing.

关 键 词：微电子机械系统(MEMS) 六自由度(6-DOF) 力传感器 封装 流速传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]