TiO2的制备及其在钙钛矿太阳电池中的应用  

Preparation of Titanium Dioxide and Its Application in Perovskite Solar Cells

作　　者：张倪 原玮敏 武晨晓 朱燕艳 Zhang Ni;Yuan Weimin;Wu Chenxiao;Zhu Yanyan(College of Mathematics and Physics,Shanghai University of Electric Power,Shanghai 200090,China)

机构地区：[1]上海电力大学数理学院

出　　处：《微纳电子技术》2019年第12期1005-1009,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51672172)

摘　　要：分别采用溶液法和磁控溅射法制备了TiO2薄膜。其中对采用磁控溅射法制备的样品进行了退火。用扫描电子显微镜(SEM)观察了薄膜的表面形貌,表征结果发现,与溶液法制备的TiO2薄膜相比,采用磁控溅射法制备的薄膜更加致密,表面粗糙度更低。X射线衍射(XRD)测试结果说明,溶液法制备的薄膜是多晶结构,而磁控溅射制备的薄膜是非晶结构,经过500℃退火后溅射的样品也只有一个(101)峰。在制备好的TiO2薄膜上旋涂钙钛矿层,将其制备成太阳电池,并测试其光电性能。I-V曲线表明,采用磁控溅射法制备的TiO2薄膜制备的电池具有更高的开路电压。Titanium dioxide(TiO2)thin films were prepared separately by the solution method and magnetron sputtering method.The samples prepared by the magnetron sputtering method were thermally annealed.The surface morphologies of the thin films were observed by the scanning electron microscopy(SEM).The characterization results show that comparing with the TiO2 thin film prepared by the solution method,the thin film prepared by the magnetron sputtering method is more dense and has a lower surface roughness.X-ray diffraction(XRD)results show that the thin film prepared by the solution method is polycrystalline,while the thin film prepared by the magnetron sputtering method is amorphous,and the sample sputtered after the anneal at 500℃has only one(101)peak.Then,aperovskite layer was spin-coated on the prepared TiO2 thin film,then a solar cell was prepared,and photoelectric properties of the solar cell were tested.I-Vcurve indicates that the cell prepared with the sputtered TiO2 film has a higher open circuit voltage.

关 键 词：TIO2薄膜 太阳电池 磁控溅射法 溶液法 电流-电压法 

分 类 号：TM914.4[电气工程—电力电子与电力传动]