钼粉粒径对钼钛薄膜性能的影响  

EFFECT OF MOLYBDENUM POWDER PARTICLE SIZE ON PROPERTIES OF Mo-Ti THIN FILM

作　　者：席莎[1] 安耿[1] 李晶[1] 韩强[1] 刘仁智[1] 赵虎[1] XI Sha;AN Geng;LI Jing;HAN Qiang;LIU Ren-zhi;ZHAO Hu(Technical Center,Jinduicheng Molybdenum Co.,Ltd.,Xi'an 710077,Shaanxi,China)

机构地区：[1]金堆城钼业股份有限公司技术中心

出　　处：《中国钼业》2019年第6期50-53,共4页China Molybdenum Industry

摘　　要：将钼钛合金靶材在同一溅射设备、同一溅射工艺下进行磁控溅射实验,研究不同粒径钼粉原料对靶材溅射薄膜性能的影响。通过XRD、SEM和直流四探针法分析结果表明,颗粒大小均匀、无团聚的大粒径钼粉制备出的靶材,其溅射薄膜性能更优异。The Mo-Ti thin film was prepared based on glass substrate with Mo-Ti as the target by magnetic control sputtering equipment,characterized by XRD,SEM and four probe DC method and the effect of molybdenum powder particle size on the properties of Mo-Ti film was discussed.The results show that the property of Mo-Ti film was better for the large particles size with uniform and free-agglomeration of molybdenum powder.

关 键 词：钼粉 钼钛靶材 磁控溅射 微观组织 

分 类 号：TG146.4+12[一般工业技术—材料科学与工程]