基于氮化铝单晶的声表面波压力传感器的特性研究  

Research on Characteristic of the Surface Acoustic Wave Pressure Sensor Based on AlN Single Crystal

作　　者：潘沛锋 Pan Peifeng(Nanjing University of Post&Telecommunications,Nanjing 210046,China)

机构地区：[1]南京邮电大学电子科学与工程学院

出　　处：《安徽电子信息职业技术学院学报》2019年第6期12-15,25,共5页Journal of Anhui Vocational College of Electronics & Information Technology

摘　　要：采用了声表面波(SAW)理论以及SAW谐振器的结构和工作原理,设计了一种基于声表面波(SAW)谐振式压力传感器。采用有限元仿真软件COMSOL Multiphysics对氮化铝单晶声表面波谐振器进行建模和仿真,提出符合声表面波振型的对称模态和反对称模态。计算出氮化铝单晶的相速度为5795.17m/s。讨论了氮化铝基底厚度对此压力传感器的相速度的影响。讨论了氮化铝金属化率对传感器的相速度的影响。最后通过附加0~1000 kg/m^2的质量块模拟不同压力下的传感器的频率响应,结果证明压力大小的变化与谐振频率之间具有良好的负相关线性关系。通过拟合得出线性表达式。Based on the theory of surface acoustic wave(SAW),and the structure and principle of SAW resonator,a SAW resonant pressure sensor is designed.The finite element simulation software COMSOL multiphysics is used to model and simulate the AlN single crystal SAW resonator.The symmetrical mode and antisymmetric mode are proposed.By calculation,the phase velocity of AlN single crystal is 5795.17m/s.The influence of AlN substrate thickness on the phase velocity of the pressure sensor is discussed.The effect of AlN metallization rate on the phase velocity of the sensor is also discussed.Finally,the frequency response of the sensor under different pressures is simulated by adding a mass of 0~1000 kg/m^2.The results show that there is a good negative correlation linear relationship between the change of pressure and the resonant frequency.The linear expression is obtained by fitting.

关 键 词：声表面波 氮化铝单晶 压力传感器 COMSOL 叉指换能器 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术] TP211.5[自动化与计算机技术—计算机科学与技术]