渐变悬浮电感参数化模型的仿真设计分析  

Simulation design and analysis of parametric model of gradual suspension inductance

作　　者：张倩 许高斌[1] 陈诚 陈兴[1] 马渊明[1] ZHANG Qian;XU Gaobin;CHEN Cheng;CHEN Xing;MA Yuanming(Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province,School of Electronic Science&Applied Physics,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学电子科学与应用物理学院安徽省微电子机械系统工程技术研究中心

出　　处：《电子元件与材料》2020年第1期42-47,共6页Electronic Components And Materials

基　　金：装备预研/教育部联合基金(6141A02022422);安徽省重点研发计划资助项目(1804a09020018)

摘　　要：针对目前片上电感无法同时提高品质因数和电感值的问题,设计了渐变悬浮电感参数化模型,研究了金属线宽及线圈间距的变化对电感性能的影响。进一步将其与双层电感模型相结合,利用HFSS软件仿真分析得到,双层渐变悬浮电感可兼顾磁场损耗、寄生电容、线圈互感等因素,同时大幅度提高品质因数和电感值,品质因数、电感值分别可达24. 66,118n H,较传统单层悬浮电感分别提高48%,436%。结果还表明上层线圈逆时针旋转0. 4°,其品质因数可提高4. 11%。The parametric model of the gradual suspension inductance was designed to improve both the quality factor and inductance value.Furthermore,the model was upgraded by combining with double-layer gradual suspension inductance.The influence of the metal linewidth and coil-span on the inductance performance was analyzed by HFSS software.When magnetic field loss,parasitic capacitance,and coil mutual inductance are taken into consideration,the double-layered model can improve the quality factor(24.66)and inductance value(118 nH).Compared with the traditional single-layer model,these values are improved by 48%and 436%,respectively.Meanwhile,the quality factor can increase by 4.11%when the upper coil rotates counterclockwise at 0.4°.

关 键 词：参数化模型 渐变型 悬浮电感 品质因数 旋转角度 

分 类 号：TM55[电气工程—电器]