一种步进式压电陶瓷驱动器负载模型研究  

Study on a load model for stepping piezoceramic actuator

作　　者：王学亮 彭吉[1,2,3] 徐立松 李朋志[1,2,3] 陈雪 郑楠[2,3] 李佩玥 WANG Xueliang;PENG Ji;XU Lisong;LI Pengzhi;CHEN Xue;ZHENG Nan;LI Peiyue(University of Chinese Academy of Sciences,Beijing 100049,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Changchun National Extreme Precision Optics Co.,Ltd.,Changchun 130033,China)

机构地区：[1]中国科学院大学,北京100049 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [3]长春国科精密光学技术有限公司,吉林长春130033

出　　处：《现代电子技术》2020年第2期14-16,19,共4页Modern Electronics Technique

基　　金：国家科技重大专项基金资助项目(2009ZX02205)

摘　　要：为了能够准确高效地以步进式压电陶瓷驱动器进行定位控制,文中对其在不同负载力条件下的位移性能进行了研究。首先,设计和实施了测定驱动器位移-负载力曲线的实验;然后,通过高阶多项式拟合的方法对实验结果进行拟合,分析得到可用的拟合结果,将其作为被测驱动器的位移-负载力关系;最后,随机选取了其他的负载力条件,将实测位移量与通过拟合曲线进行计算的结果进行对比,验证该位移-负载力模型的准确性。实验结果表明,使用该方法获得的步进式压电陶瓷驱动器的位移-负载力模型可用2阶多项式关系进行描述,与实测值的误差约为1%,可为后续针对该驱动器进行定位控制算法设计提供支撑。The displacement performance of the stepping piezoceramic actuator under different load force conditions isstudied to accurately and efficiently perform the positioning control with it.The experiment of measuring the displacement⁃load force curve of the actuator was designed and implemented.The experimental results are fitted by means of the high⁃order polynomial fitting method,and the available fitting results are obtained by analyzing,which are taken as the displacement⁃load force relationship of the actuator under test.Other load force conditions are selected randomly,and the measured displacement values are compared with the results calculated by the fitted curve to verify the accuracy of the displacement⁃load force model.The experimental results show that the displacement⁃load force model of the stepping piezoceramic actuator obtained with this method can be described by the second⁃order polynomial relation,and the error of this method is about 1%in comparison with the measured value;which can provide a support for the subsequent design of positioning control algorithm for this actuator.

关 键 词：压电陶瓷 步进式驱动器 定位控制 负载实验 多项式拟合 数据分析 

分 类 号：TN305.7-34[电子电信—物理电子学]