多晶硅在微波场中动态升温特性研究  

Study on Dynamic Heating Characteristics of Polysilicon in Microwave Field

作　　者：蔺琎 亢若谷[2] 郭胜惠 苏杰[2] 尚小标 LIN Jin;KANG Ruogu;GUO Shenghui;SU Jie;SHANG Xiaobiao(Kunming Engineering Training Center of Kunming University of Technology,Kunming 650504,China;Kunming Metallurgical Research New Materials Co.,Ltd,Kunming 650031,China;Key Laboratory of the Ministry of Non-conventional Metallurgical Education of Kunming University of Technology,Kunming 650093»China;College of Mechanical and Electrical Engineering,Kunming University of Technology,Kunming 650504,China)

机构地区：[1]昆明理工大学工程训练中心,昆明650504 [2]昆明冶研新材料股份有限公司,昆明650031 [3]昆明理工大学非常规冶金教育部重点实验室,昆明650504 [4]昆明理工大学机电工程学院,昆明650504

出　　处：《有色金属工程》2019年第12期15-21,共7页Nonferrous Metals Engineering

基　　金：国家自然科学基金资助项目（51664035）;云南省人才培养项目（KKSY201601045）~~

摘　　要：为研究多晶硅在微波熔炼中的动态升温特性,优化微波熔炼工艺参数,以多晶硅为原料进行微波熔炼实验,探讨微波功率、物料量和物料粒度等因素对多晶硅在微波场中升温行为的影响。研究结果表明,提高微波功率、减少物料质量,有利于提高物料在微波场中的升温效率;在实验范围内,粒度越小,物料在微波场中的升温速率越快;按重要隶属度排行,功率条件重要度最高,其次是物料质量,粒度对物料升温速率的影响最小。In order to study the dynamic heating characteristics of polysilicon in microwave smelting and optimize the process parameters of microwave smelting,this study used polysilicon as raw material for microwave smelting test,and discussed the influence of microwave power,material quantity,and material granularity on the heating behavior of polysilicon in microwave field.The research results show that increasing microwave power and reducing the material quantity are beneficial to improve the heating efficiency of the materials in microwave field.In the test range,the smaller the granularity,the faster the heating rate of the material in the microwave field.According to the important membership degree,the power condition is the most important,followed by the material quantity,the granularity has the least influence on the material heating rate.

关 键 词：微波 多晶硅 功率 物料量 粒度 

分 类 号：TF122[冶金工程—粉末冶金]