可挠线圈作定子结构的微型永磁马达的制作与研究  

Fabrication and Research of Micro Permanent Magnet Motor With Flexible Coil as Stator Structure

作　　者：张正中[1] 葛健芽[1] 杨晓红[1] 方晓汾[2,3] ZHANG Zhengzhong;GE Jianya;YANG Xiaohong;FANG Xiaofen(Jinhua Polytechnic,Jinhua Zhejiang 321007,China;Zhejiang University,Hangzhou 310058,China;Quzhou College of Technology,Quzhou Zhejiang 324000,China)

机构地区：[1]金华职业技术学院,浙江金华321007 [2]浙江大学,杭州310058 [3]衢州职业技术学院,浙江衢州324000

出　　处：《微电机》2019年第12期23-27,共5页Micromotors

基　　金：国家自然科学基金:软磁非晶合金多形相变结构模型建立及机理研究(51771083);浙江省自然科学基金(LQ16E050013);浙江省科学技术厅2013年省级公益技术研究工业项目(2013C31120);浙江省竹资源与高效利用协同创新中心开放项目(2017ZZY2-04)

摘　　要：设计和制作了一种直径为1.5mm圆筒型微型永磁同步马达,应用永磁体钕铁硼为马达转子,马达定子采用可挠线圈与导磁外壳相结合的结构;可挠线圈的制作采用准LIGA工艺,利用厚层光刻胶KMPR1050制作微模具,以电铸方法制作线圈;研制了微型马达样机,测试结果显示该微型马达最高转速可达7000r/min,轴偏摆为22μm,为微型永磁同步马达进一步设计与开发提供了参考价值。A micro permanent magnet synchronous motor with 1.5 mm diameter was designed in this paper.The motor was formed with permanent magnet rotor and flexible coil stator in magnetic cover.The flexible coil was made by quasi LIGA process.The thick film photoresists KMPR1050 was used to make the micro mold.Coils were fabricated by electroforming.The micro magnet motor was made and assembled.The test results show that the micro motor can rotate at a maximum speed of 7000 r/min and the axial deflection is 22μm,providing reliable foundation for the further design and application of the micro permanent magnet motor.

关 键 词：微型永磁马达 可挠线圈 LIGA工艺 电铸 厚层光刻胶 

分 类 号：TM381[电气工程—电机]