局部结构误差对闪耀光栅衍射特征的影响  

Influence of partial structural error on diffraction characteristics of blazed grating

作　　者：邓启威 陶冶[2] 孙年春[1] 张蓉竹[1] DENG Qiwei;TAO Ye;SUN Nianchun;ZHANG Rongzhu(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China;College of Mechanical Engineering,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学电子信息学院,成都610065 [2]四川大学机械工程学院,成都610065

出　　处：《激光杂志》2020年第1期55-59,共5页Laser Journal

基　　金：国家高技术研究发展计划资助项目(No.2015AA8042038)

摘　　要：利用标量衍射理论对闪耀光栅局部结构存在误差时的衍射效率进行了分析,计算了闪耀光栅局部出现占空比和闪耀角误差对衍射效率的影响。结果表明:当闪耀光栅局部占空比减小时,一级衍射光强变小,反之,一级衍射光强变大。而当加工使部分闪耀角出现误差时,一级衍射光强会随之变小。此外分析了不同误差个数和不同入射角下,占空比和闪耀角误差对闪耀光栅衍射特征的影响,当出现的误差个数增多时,会增强占空比或闪耀角误差对一级衍射光强的影响,而当占空比或闪耀角误差一定时,一级衍射光强随入射角的增大而减小。The diffraction characteristics of the blazed grating is analyzed by scalar diffraction theory. The influences of the partial duty ratio and blaze angle error on the diffraction efficiency are calculated. The results show that when the partial duty ratio of the blazed grating reduces,the first-order diffracted light intensity becomes lower. Conversely,the first-order diffracted light intensity becomes higher. When the partial blaze angle has errors,the first-order diffracted light intensity becomes lower. In addition,the effects of duty ratio and blaze angle error on the diffraction characteristics of the blazed grating are analyzed with different error numbers and incident angles. When the number of errors increases,the influences of duty ratio or blaze angle error will be enhanced on the first-order diffracted light.When the duty ratio or blaze angle error is certain,the first-order diffracted light intensity will decrease with the increasing of the incident angle.

关 键 词：光栅 衍射效率 标量衍射理论 局部结构误差 

分 类 号：O436.1[机械工程—光学工程]