基于法布里-珀罗标准具的亚微米级位移测量方法  

Submicron Displacement Measurement Method Based on Fabry-Perot Etalon

作　　者：沈小燕 蓝旭辉 朱鹤年 孙志鹏[1] 禹静 Shen Xiaoyan;Lan Xuhui;Zhu Henian;Sun Zhipeng;Yu Jing(College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;Department of Physics,Tsinghua University,Beijing 100084,China)

机构地区：[1]中国计量大学计量测试工程学院院=,浙江杭州310018 [2]清华大学物理系,北京100084

出　　处：《中国激光》2019年第12期155-163,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金面上项目(51875543);国家自然科学基金青年基金(61605193)

摘　　要：受限于面阵像元尺寸和细分技术,利用面阵器件进行长度测量难以达到亚微米级。提出了一种基于法布里-珀罗(F-P)标准具多光束干涉成像原理的二维亚微米级位移测量方法,通过计算同心干涉圆环圆心坐标变化量得到焦平面内的二维微位移。采用虚拟面阵像元细分和峰位坐标局域细分技术等处理面阵海量信息,减小未定系统误差影响,实现同心干涉圆环圆心坐标的准确求取。实验采用间隔约为2 mm的F-P标准具、焦距约为50 mm的光学透镜,对焦平面内不同位置处的成像同心干涉圆环圆心进行计算,测量范围基本可达到3 mm。实验采用激光相调差动干涉仪进行位移比对测量,在34μm量程范围内,测量结果的直线拟合标准差为0.0154w″(w″为相对像元间隔),包含因子为2.45时扩展不确定度为0.036w″,验证了该测量方法的准确性。When a length is measured using a plane array device, reaching submicron-level accuracy is difficult because of the limitation imposed by the pixel size of the plane array device and subdivision technique. Therefore, we propose a method for measuring two-dimensional submicron displacements based on the multibeam interference principle of the Fabry-Perot(F-P) etalon. A two-dimensional micro-displacement in the focal plane is obtained by calculating the variation of the center coordinate of a concentric interference ring. The virtual plane array pixel subdivision technique and peak-position coordinate local subdivision technology are used to process the massive information of the plane array. In this way, the influence of undetermined systematic error is reduced, which allows an accurate calculation of the center coordinate of the concentric interference ring. The experiment uses an F-P etalon with an interval of approximately 2 mm and a optical lens with focal length about 50 mm. The center of the imaging concentric interference ring is calculated at different positions in the focal plane. The results show that the measurement range can reach 3 mm. The experiment uses a laser phase-modulating homodyne interferometer for the comparison measurements. The results show that in the range of 34 μm, the linear fitting standard deviation of the measured results is 0.0154w″ and the extended uncertainty is 0.036w″ when the coverage factor is 2.45, where w″ is the relative pixel interval. These results confirm the accuracy of the measurement method.

关 键 词：测量 干涉测量法 微位移 法布里-珀罗标准具 数理统计 

分 类 号：O436[机械工程—光学工程]