三轴超精密单点金刚石车床SGDT350研制  

Development of Three Axis Ultra-precision Single Diamond Lathe SGDT350

作　　者：阳红[1] 刘有海[1] 张敏[1] 陈东生[1] 戴晓静[1] 宋颖慧 肖虹[1] YANG Hong;LIU You-hai;ZHANG Min;CHEN Dong-sheng;DAI Xiao-jing;SONG Ying-hui;XIAO Hong(Institute of Mechanical Manufacturing Technology,China Academy of Engineering Physics,Mianyang Sichuan 621900,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所

出　　处：《组合机床与自动化加工技术》2020年第2期158-160,共3页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金(51305413);高档数控机床国家科技重大专项(2017ZX04022001-201-003);中物院超精密加工技术重点实验室基金(K1128)

摘　　要：文章介绍了基于静压支承技术自主研制的三轴超精密单点金刚石车床SGDT350。机床采用模块化设计,构建了开放式控制体系,成功实现了机床的高精度运动。经实测机床主轴回转跳动≤50nm,导轨直线度允差≤0.3μm/250mm,加工φ75mm口径SR250mm铝合金凸球面面形PV值达0.24μm,表面粗糙度Sa值达3.5nm,表明了机床具有较好的运动精度和加工性能。Based on the hydrostatic bearing technology,ultra-precision three-axis single diamond has been successfully developed.Using modular design method and open control system,ultra-precision movement of the lathe had been realized.The spindle rotation run-out of the lathe≤50nm,the straightness tolerance of the guide rail≤0.3μm/250mm,the PV value of the convex spherical surface of SR250mm with 75mm diameter reached 0.24μm,and the roughness was 3.5nm.The results prove this machine has excellent motion accuracy and machining performance.

关 键 词：超精密 静压支承 单点金刚石车床 

分 类 号：TH16[机械工程—机械制造及自动化] TG65[金属学及工艺—金属切削加工及机床]