扫描式激光测径仪中电机转速波动对精度的影响及误差修正研究  

Influence of motor speed fluctuation in laser scanning diameter measuring gauge on accuracy and its error correction

作　　者：段长超 彭松 谭骏[1] 方辉[1] DUAN Changchao;PENG Song;TAN Jun;FANG Hui(School of Manufacturing Science and Engineering,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学制造科学与工程学院

出　　处：《现代电子技术》2020年第4期112-116,共5页Modern Electronics Technique

基　　金：国家自然科学基金资助项目(51175356)

摘　　要：激光扫描测量设备中,测量精度主要取决于扫描光带的平行性以及其扫描速度是否均匀,而扫描速度的均匀性主要取决于驱动多面棱镜旋转的驱动电机,其转速波动或漂移是造成测量误差的主要原因。该研究通过在测量光路中加入尺寸已知的光阑,利用同时测量光阑和未知测量对象直径的同步测量方法来消除电机转速波动的影响,并利用非线性补偿方法进行误差修正,尽可能减小系统误差对测量误差的影响。实验验证结果表明,经以上方法优化的激光扫描测量设备测量精度达到±0.002 mm,能够满足实际应用需要。In the laser scanning measurement equipment,the measurement accuracy mainly depends on the parallelism of the scanning light band and the uniformity of its scanning speed,while the uniformity of the scanning speed mainly depends on the driving motor driving the rotation of the polyhedral prism,and the speed fluctuation or drift is the main cause of the measurement error.The influence of motor speed fluctuation can be eliminated by adding the apertures with known dimensions to the measurement beam,and by means of the synchronous measurement method that the diameter of the unknown measurement object and the aperture can be measured simultaneously.The error correction is performed by means of the nonlinear compensation method to minimize the impact of system error on measurement error.The experimental verification results show that the measurement accuracy of the optimized laser scanning measuring equipment can reach to±0.002mm,which can meet the needs of the practical applications.

关 键 词：转速波动 误差修正 激光扫描 同步测量 非线性补偿 高精度测量 

分 类 号：TN929-34[电子电信—通信与信息系统]