压电基片上微流分析器件研究  

Study on Microfluidic Analysis Device on Piezoelectric Substrate

作　　者：章安良 董良威[2] ZHANG Anliang;DONG Liangwei(Dept.of Microelectrics,Wuyi University,Wuyishan 354300,China;Dept.of Electronic Engineering,Changzhou Institute of Technology,Changzhou 213022,China)

机构地区：[1]武夷学院微电子系,福建武夷山354300 [2]常州工学院电子系,江苏常州213022

出　　处：《压电与声光》2020年第1期4-7,共4页Piezoelectrics & Acoustooptics

基　　金：江苏省高校自然科学研究基金资助项目(17KJB510004);武夷学院高级人才基金资助项目(YJ201809)

摘　　要：该文提出了一种新的、低成本微流器件制作方法。采用138℃熔点、直径Ф500μm的低熔点焊锡丝构建微流器件图案,放入盛有聚二甲基硅氧烷(PDMS)的小槽中,在80℃恒温箱内固化,接着在200℃恒温箱内采用注射管气压挤出熔融焊锡丝,一次成型微通道。将微流器件和测试纸基片集成于128°YX-LiNbO3压电基片上,在声表面波能量辐射辅助作用下,微流器件输运的反应液可在测试纸基片上实现生化反应。采用所研制的压电微流器件实现了红墨水溶液输运及淀粉显色反应,验证了微流分析器件的功能。A new and low cost method for fabricating the microfluidic device was presented in this paper.The microfluidic device patterns were made from a low-melting-point electric soldering wire with 138℃ of melting-point and Ф500μm of diameter.The patterns were dipped into a small tank containing un-solidified polydimethylsiloxane(PDMS)and solidified in a constant temperature box at 80℃.Then,the electric soldering wire was melted at 200℃ and extruded using a syringe to form the micro-channels.The microfluidic device,together with a paper-based device,was mounted on 128°-YX LiNbO3 piezoelectric substrate.A biochemical reaction on the paper-based device,in which reaction solutions were transported by the microfluidic device,can be implemented with the assistance of surface acoustic wave energy radiation.The transport of red ink solution and the color development reaction of starch were implemented by the piezoelectric microfluidic device,which verified the function of microfluidic analysis device.

关 键 词：叉指换能器 声表面波 微流器件 微流输运 显色反应 

分 类 号：TN371[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]