电子级多晶硅制备过程中质量影响因素分析  

Analysis of quality influencing factors in the process of electronic grade polysilicon preparation

作　　者：陈辉 张征 万烨 孙强[1,2] 张晓伟 张邦洁[1,2] 王浩 裴蕾 CHEN Hui;ZHANG Zheng;WAN Ye;SUN Qiang;ZHANG Xiao-wei;ZHANG Bang-jie;WANG Hao;PEI Lei

机构地区：[1]洛阳中硅高科技有限公司,河南洛阳417023 [2]中国恩菲工程技术有限公司,北京100038

出　　处：《中国有色冶金》2019年第6期49-51,70,共4页China Nonferrous Metallurgy

基　　金：河南省科技研发专项(174200510014);郑洛新国家自主创新示范区创新引领型产业集群专项

摘　　要：电子级多晶硅是微电子行业、信息产业和新能源产业的基础性材料,目前,全球电子级高纯多晶硅总产能约31000 t,我国高品质多晶硅仍然需要大量进口。电子级多晶硅产品质量控制要求非常严格,目前生产工艺主要有三氯氢硅氢还原法和硅烷热分解法两种,全球90%以上的多晶硅企业采用三氯氢硅氢还原工艺生产,国内也多采用此工艺生产电子级多晶硅。本文针对三氯氢硅氢还原工艺对影响多晶硅质量的因素进行了阐述,包括三氯氢硅、氢气纯度,物料管线纯度,CVD炉材质,备品备件选取,硅棒后处理装置,设备维护保养等,以期为电子级高纯多晶硅的生产和后处理过程提供参考。Electronic grade polysilicon is the basic material for the microelectronics industry,the information industry and the new energy industry.At present,the global electronic grade high-purity polysilicon has a total production capacity of about 31000 tons.China’s high-quality polysilicon still needs a large amount of imports.The quality control requirements of electronic grade polysilicon products are very strict.At present,the production processes mainly include trichlorosilane-hydrogen reduction process and silane pyrolysis process.More than 90%of electronic grade polysilicon in the world are produced by the trichlorosilane-hydrogen reduction process,and this process is also used in China to produce electronic grade polysilicon.In this paper,the influencing factors affecting the quality of polysilicon were described in the process of trichlorosilane-hydrogen reduction process,which include the purity of trichlorosilane and hydrogen,the purity of material pipeline,CVD furnace material,spare parts selection,silicon rod post-processing equipment,equipment maintenance,etc.In order to provide reference for the production and post-processing of electronic grade high purity polysilicon.

关 键 词：电子级多晶硅 制备 三氯氢硅氢还原法 影响因素 

分 类 号：TN304.1+2[电子电信—物理电子学]