差压式MEMS电容薄膜真空规的设计与测试  

Design and Test of Differential MEMS Capacitance Diaphragm Gauge

作　　者：李刚[1] 韩晓东 李得天[1,2] 成永军 孙雯君[1] 柯鑫[1] 冯勇建 许马会 LI Gang;HAN Xiaodong;LI Detian;CHENG Yongjun;SUN Wenjun;KE Xin;FENG Yongjian;XU Mahui(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Aerospace Engineering,Xiamen University,Xiamen 361000,Fujian,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]厦门大学航空航天学院,福建厦门361000

出　　处：《真空与低温》2020年第1期17-20,共4页Vacuum and Cryogenics

基　　金：国家自然科学基金重大科研仪器研制项目(61627805)

摘　　要：提出了一种基于MEMS技术的差压式电容薄膜真空规设计方案。通过有限元分析软件建立了仿真模型,对感压薄膜尺寸和电极间距离进行了优化。根据优化结果,完成了真空规的研制和性能测试。测试结果表明,测量范围下限5 Pa,上限1000 Pa,灵敏度优于10 fF/Pa,测试曲线可以实现分段线性。A scheme of Capacitance Diaphragm Gauge(CDG)based on MEMS technology was proposed.The simulation model was established using finite element analysis software,and the size of the diaphragm and the distance between electrodes were optimized.According to the optimization results,a differential CDG was developed,and its performance was tested.Results show that the measurement range covers from 5 Pa to 1000 Pa,the sensitivity is better than 10fF/Pa,and the test curve is piecewise linear.

关 键 词：MEMS技术 差压式 电容薄膜真空规 

分 类 号：T8771[一般工业技术]