极小分压力校准研究  

Study on Calibration of Very Low Partial Pressure

作　　者：孙雯君[1] 董猛[1] 成永军[1] 吴成耀 魏宁斐 SUN Wenjun;DONG Meng;CHENG Yongjun;WU Chengyao;WEI Ningfei(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室

出　　处：《真空与低温》2020年第1期61-66,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金(61901203,61841106);甘肃省杰出青年基金(18JR3RA413);甘肃省科技成果重点推广计划项目(17ZD2WA001)

摘　　要：提出了静态膨胀法真空基础标准和动态流量法相结合的分压力校准方法,解决了10^-6 Pa以下极小分压力的校准难题。基于该方法研制了新一代极小分压力校准装置,在电子倍增器模式下,开展了单一气体进样四极质谱计灵敏度校准实验研究。研究结果表明分压力校准下限可延伸至1×10^-9 Pa,分压力校准范围为10^-9~10^-5 Pa时对应的测量不确定度U r=8.4%(k=2)。研究结果保障了质谱计应用于空间探测等领域时分压力测量结果的准确性。A calibration method of partial pressure based on the combination of the static expansion vacuum basic standard and continuous expansion method is proposed,which solves the calibration problem of the minimum partial pressure below 10-6 Pa.Based on the method,a new calibration device for the minimum partial pressure is developed.In the electron multiplier mode,the calibration experiment of quadrupole mass spectrometer(QMS)is carried out by injecting single gases.The experiment results show that the lower calibration limit of the partial pressure can be extended to 1×10^-9 Pa.And when the range of partial pressure calibration is 10^-5~10^-9 Pa,the corresponding uncertainty U r=8.4%(k=2).The research ensures the accuracy of partial pressure measurement results when QMS is used in space exploration and other fields.

关 键 词：极小分压力 灵敏度 四极质谱计 校准装置 校准方法 

分 类 号：TB771[一般工业技术—真空技术]